Effect of implantation temperature on exfoliation of H2+-implanted Si

Damage induced by helium ion irradiation in Fe-based metallic glass

“…In lots of annealing studies, the order of crystalline phase appeared in Fe-based metallic glasses is metastable α/β-Mn type and Fe23B6 phases→α-Fe phase→metastable Fe3B phase→stable α-Fe and Fe2B phases [14][15][16]. However, in this study, metastable β-Mn type and orthogonal Fe3B phases still existed even under the irradiation at the maximum fluence (1.6×10 18 ions/cm 2 ，76dpa). This is due to the fact that ion irradiation is such a non-equilibrium process of energy injection that the energy carried by incident ions dissipate fast in the amorphous matrix, and there is no enough time for target atoms to relax to the steady state.…”

“…The ion beam irradiation experiment was completed on the 320kV highly charged ion research platform at Institute of modern physics, Chinese academy of sciences. The samples were irradiated with He 2+ ions of 300keV energy with fluences of 1×10 17 ions/cm 2 , 2×10 17 ions/cm 2 , 4×10 17 ions/cm 2 , 1×10 18 ions/cm 2 and 1.6×10 18 ions/cm 2 . To avoid the effect of irradiation ions flux on the material behavior [9,10], the flux for all the samples was 1.2×10 13 ions/cm 2 s.…”

“…When the fluence increased was 4×10 17 ions/cm 2 (19dpa), the most popular diameters of helium bubbles were less than 5 nm. And the average sizes of helium bubbles increased significantly with the fluences incerased form 4×10 17 ions/cm 2 (19dpa) to 1×10 18 ions/cm 2 (47dpa). When the fluence increased further to 1.6×10 18 ions/cm 2 (76dpa), helium bubbles grew slowly.…”

“…And the average sizes of helium bubbles increased significantly with the fluences incerased form 4×10 17 ions/cm 2 (19dpa) to 1×10 18 ions/cm 2 (47dpa). When the fluence increased further to 1.6×10 18 ions/cm 2 (76dpa), helium bubbles grew slowly. This is related to the increase in quantity of nanocrystals at this fluence.…”

“…Therefore, β-Mn type phase formed under the irradiation at a fluence of 4×10 17 ions/cm 2 (19dpa). When the fluence increased to 1×10 18 ions/cm 2 (47dpa), β-Mn type phase transformed into stable α-Fe and Fe2B phases with lower activation energies. In the studies of Umakoshi et al [4] and Rizza et al [6], similar crystalline phases such as α-Fe phase and Fe2B phase formed in Fe-based metallic glasses after the irradiation.…”