Effect of Oxide Buffer Layer on the Thermochromic Properties of VO2 Thin Films

Effect of buffer layer on thermochromic performances of VO2 films fabricated by magnetron sputtering

“…Utilizing the buffer layer material having structural similarity with VO 2 , the deposition of vanadium dioxide films on soda lime float-glass with superior thermochromic performances can be more easily achieved [18]. Moreover, the buffer layer can also act as a diffusion barrier of alkali ions from the soda lime float-glass [19].…”

“…However, it has been reported that sodium ions from soda lime float-glass can hinder the formation of thermochromic VO 2 thin film during the deposition process [12]. In addition, according to the report [13], sodium ions in soda lime float-glass can easily diffuse at room temperature. Therefore, to deposit a buffer layer between the VO 2 film and the soda lime glass substrate, which can work as a diffusion barrier of alkali ions from soda lime float-glass, is a good method to help deposit VO 2 film with excellent thermochromic properties on soda lime float-glass.…”

High temperature coefficient of resistance of low-temperature-grown VO2 films on TiO2-buffered SiO2/Si (100) substrates

“…[9][10][11][12][13][14][15][16] By precise control of the oxygen flow ratio in sputtering, Jin and Tanemura succeeded in fabricating polycrystalline VO 2 films directly on a Si substrate or Pyrex glass at 573 K. 17 The low-temperature-grown VO 2 films showed a transmittance change of about 40% at wavelength of 2000 nm; however, their electrical properties were not reported. For smart-widow or optical-switch applications of VO 2 films on soda-lime glass, it has been reported that oxide buffer layers such as ZnO, SnO 2 , or TiO 2 decrease the growth temperature of VO 2 films to below 670 K. 18 A large change in resistivity of two orders of magnitude was observed for polycrystalline VO 2 films grown by pulsed laser deposition (PLD) on ZnO-, SnO 2 -, or TiO 2 -buffered sodalime glass substrates at <670 K. From this report, we inferred that such oxide buffer layers might have the effect of decreasing the growth temperature of polycrystalline VO 2 films that show sharp MITs, even on SiO 2 /Si substrates.…”

Review on thermochromic vanadium dioxide based smart coatings: from lab to commercial application

“…Besides the antireflection layers on the top of VO 2 films, buffer layers between the substrates and VO 2 films also play important roles in the optical performances of integrated coatings. Some buffer layers as SiO 2 , TiO 2 , SnO 2 , ZnO, CeO 2 , and SiN x have been investigated in reported works [75][76][77][78]. Nevertheless, thermochromic performances of VO 2 coatings obtained based on above buffer layers are fair, which still can not match the requirements for practical applications.…”