Single and multilayered structures at nano‐length scale are very attractive materials due to their high strength, toughness, and wear resistance relative to conventional laminated composites. In this study, single layered Al, SiC, and multilayered Al/SiC composites were synthesized by DC/RF magnetron sputtering. The microstructure of the multilayered structures was characterized by scanning electron microscopy (SEM). The elastic and plastic behavior of single and multilayered materials was investigated by nanoindentation and tensile testing. For nanoindentation, an analytical model was employed to subtract the contribution of the Si substrate, in order to extract the true modulus of the films. Finite element simulations were employed to confirm the analytical predictions and to investigate the anisotropic elastic behavior of the multilayered composite. It was concluded that while indentation provides reasonable Young's modulus and hardness values in monolithic layers, it does not provide the true modulus of the multilayered materials because of their inherent anisotropy.