Effect of Squeeze Film Damping and AC Actuation Voltage on Pull-in Phenomenon of Electrostatically Actuated Microswitch

Harsha, C. Sri; Prasanth, C. S.; Pratiher, Barun

doi:10.1016/j.proeng.2016.05.108

Cited by 5 publications

(4 citation statements)

References 9 publications

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“…The MEMS switches have profound use for high-performing devices such as defense systems, aerospace products, the automobile industry, food industry, and radar communication devices. It has been recommended in different studies by the researchers that the use of graphene can improve the reliability and life span of MEMS switches in future [127,166,167].…”

Section: Discussionmentioning

confidence: 99%

MEMS Switch Realities: Addressing Challenges and Pioneering Solutions

Kurmendra,

Agarwal

2024

Micromachines

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Micro-Electro-Mechanical System (MEMS) switches have emerged as pivotal components in the realm of miniature electronic devices, promising unprecedented advancements in size, power consumption, and versatility. This literature review paper meticulously examines the key issues and challenges encountered in the development and application of MEMS switches. The comprehensive survey encompasses critical aspects such as material selection, fabrication intricacies, performance metrics including switching time and reliability, and the impact of these switches on diverse technological domains. The review critically analyzes the influence of design parameters, actuation mechanisms, and material properties on the performance of MEMS switches. Additionally, it explores recent advancements, breakthroughs, and innovative solutions proposed by researchers to address these challenges. The synthesis of the existing literature not only elucidates the current state of MEMS switch technology but also paves the way for future research avenues. The findings presented herein serve as a valuable resource for researchers, engineers, and technologists engaged in advancing MEMS switch technology, offering insights into the current landscape and guiding future endeavors in this rapidly evolving field.

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Section: Discussionmentioning

confidence: 99%

MEMS Switch Realities: Addressing Challenges and Pioneering Solutions

Kurmendra,

Agarwal

2024

Micromachines

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“…Hence, one may go for approximate solution by using the perturbation method. Here, method of multiple scales as explained in [25,[29][30][31][32][33] is used to obtain the set of algebraic equations turning into non-autonomous equations of motion for three resonance conditions, viz. primary resonance, parametric resonance condition, and third-order sub-harmonic conditions are being expressed under steady state conditions.…”

Section: Bifurcation and Stabilitymentioning

confidence: 99%

“…primary resonance, parametric resonance condition, and third-order sub-harmonic conditions are being expressed under steady state conditions. The procedures used to derive the reduced order equation are similar to those explained in [25,[29][30][31][32][33]. Based on numerical values of the coefficients of the damping, forcing, and non-linear terms, they are one order less than the coefficients of the linear terms, which have a value of unity in this case and as result, in the following technique, co-efficient are expressed as and K ¼ εK for sake of simplicity.…”

Section: Bifurcation and Stabilitymentioning

confidence: 99%

“…Based on numerical values of the coefficients of the damping, forcing, and non-linear terms, they are one order less than the coefficients of the linear terms, which have a value of unity in this case and as result, in the following technique, co-efficient are expressed as and K ¼ εK for sake of simplicity. By using method of multiple scales with the procedure as explained in [25,30,32,33], substituting…”

Section: Bifurcation and Stabilitymentioning

confidence: 99%

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Electrostatically Driven MEMS Resonator: Pull-in Behavior and Non-linear Phenomena

Pratiher¹

2020

Nonlinear Systems -Theoretical Aspects and Recent Applications

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This chapter deals with the investigation on stability and bifurcation analysis of a highly non-linear electrically driven micro-electro-mechanical resonator has been established. A non-linear model of this system will briefly be described considering both transverse and longitudinal displacement of the resonator. A short description to explore the need of incorporating higher-order correction of electrostatic pressure has been highlighted. The pull-in results and consequences of higherorder correction on the pull-in stability will be reported. In addition, consequences of air-gap, electrostatic forcing parameter, and effective damping on non-linear phenomena have been studied to highlight the possible undesirable catastrophic failure at the unstable critical points. Basins of attractions that postulate a unique response in multi-region state for a specific initial condition will also be studied. This chapter can enable a significant adaptation to identify the locus of instability in micro-cantilever-based resonator when subjected to AC voltage polarization with the understanding of theoretical ideas for controlling the systems and optimizing their operation.

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Optimal homotopy asymptotic method to large post-buckling deformation of MEMS

Herişanu

Marinca

2018

MATEC Web Conf.

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Abstract. In the present paper, the post-buckling response of an axially stressed clampedclamped actuator, modeled as a beam and subjected to a symmetric electrostatic field is analyzed. An analytical approximate method, namely the Optimal Homotopy Asymptotic Method (OHAM) is applied to the governing nonlinear integro-differential equation. The analytical results obtained through the proposed procedure show excellent agreement with numerical solution, proving the validity of the proposed procedure, which is simple and easy to use.

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Effect of Squeeze Film Damping and AC Actuation Voltage on Pull-in Phenomenon of Electrostatically Actuated Microswitch

Cited by 5 publications

References 9 publications

MEMS Switch Realities: Addressing Challenges and Pioneering Solutions

MEMS Switch Realities: Addressing Challenges and Pioneering Solutions

Electrostatically Driven MEMS Resonator: Pull-in Behavior and Non-linear Phenomena

Optimal homotopy asymptotic method to large post-buckling deformation of MEMS

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