Gold nanoparticles (AuNPs) were deposited by DC-magnetron sputtering onto molybdenum trioxide (MoO 3 ) thin films grown by Photochemical MetalOrganic Deposition (PMOD) on Si(100) and borosilicate glass substrates. The chemical, optical and morphology properties of the films were studied by UV/ Vis Spectroscopy, Scanning Electron Microscopy (SEM), X-Ray Photoelectron Spectroscopy (XPS), and X-Ray Diffraction (XRD). SEM revealed that AuNPs formed after 5 s of sputtering. AuNPs are spherical and have both an average diameter of 18 nm and a relatively narrow size distribution. As the deposition time increases, larger structures are formed by an aggregation of AuNPs. XPS studies of the AuNP/MoO 3 films on Si(100) showed the presence of Mo(VI) and Mo(V), which indicated that the films were primarily non-stoichiometric molybdenum oxides. The occurrence of oxygen vacancies in the substrate play an important role to stabilize the AuNPs. , gas sensing 11-13 and catalysis [14][15][16][17][18][19][20] .
KeywordsAuNPs have been prepared using various approaches that can be divided into physical and chemical methods. Included among the chemical methods are reduction
21, photochemistry using UV irradiation 22,23 , photochemistry using X-ray irradiation 24 , sonochemistry 25,26 , and sonoelectrochemistry 27 . A physical method that can be used is cathodic deposition using magnetron sputtering. This physical method has several advantages over chemical syntheses, such as a lack of surface contamination from solvent or precursor molecules, which may be important for subsequent assays and/or applications. Furthermore, physical deposition is cheaper and faster and does not damage the environment [28][29][30] .Gold catalysts with selected support materials can efficiently promote many reactions that normally occur at much higher temperatures or with lower selectivity when catalyzed by other metals. It has been shown that AuNPs supported on metal oxides exhibit unique activity at room temperature because of a meta-stable interatomic bonding between gold atoms 31 . It has been shown that substrates such as ceria 32 , titania 33,34 and titanates 35 can stabilize AuNPs in which oxygen vacancies play an important role in the stabilizing effect. It is generally accepted that interfaces provide adequate sites for chemical reactions, and metallic Au surfaces are required as reservoirs for a determined reactant 36,37 . Gold nanoparticles also play an important role in the development of chemical and biological sensors. A sensor usually has two functional components: one component selectively binds with the analyte, and the other provides transduction of this interaction into a detectable signal 38 . Considering the chromogenic properties of molybdenum oxide on the one hand and the catalytic properties of gold nanoparticles on the other, a binary system that is formed by molybdenum oxide coated with gold nanoparticles could potentially be of use in the field of catalysis and/or in the fabrication of new specific sensors. For example, i...