Effect of the Ligand Structure on Chemical Vapor Deposition of WN_xC_y Thin Films from Tungsten Nitrido Complexes of the Type WN(NR₂)₃

Abstract

Tungsten nitrido complexes of the type WN­(NR2)3 [NR2 = combinations of NMe2, NEt2, N i Pr2, N n Pr2, N i Bu2, piperidine, and azepane] were synthesized as precursors for aerosol-assisted chemical vapor deposition of WN x C y thin films. The effects of the amido substituents on precursor volatility and decomposition were evaluated experimentally and computationally. Films deposited using WN­(NMe2)­(N i Pr2)2 as a single-source precursor were assessed as diffusion barrier materials for Cu metallized integrated circuits in terms of growth rate, surface roughness, composition, and density. In diffusion barrier tests, Cu (∼100 nm)/WN x C y (∼5 nm)/Si samples prepared from WN­(NMe2)­(N i Pr2)2 were annealed for 30 min at 500 °C and successfully blocked Cu penetration according to four-point probe, X-ray diffraction, scanning electron microscopy etch-pit test, and high-resolution transmission electron microscopy measurements.

Surface Reactions of Low-Energy Argon Ions with Organometallic Precursors

“…In the N­(1s) region, increasing Ar + exposure also leads to a systematic decrease in spectral intensity, although the N­(1s) peak broadens and splits into two differentiable peaks at ≈398.5 and 400.9 eV. We tentatively assigned the lower binding energy peak to the N species directly bonded to the W atom, with the higher binding energy being indicative of the formation of CN x species . After an Ar + dose of 0.14 mC/cm 2 , the N­(1s) peak cannot be discerned from the baseline.…”

“…We tentatively assigned the lower binding energy peak to the N species directly bonded to the W atom, with the higher binding energy being indicative of the formation of CN x species. 43 After an Ar + dose of 0.14 mC/cm 2 , the N(1s) peak cannot be discerned from the baseline.…”

“…Solvents were purified using a MBraun MB-SP solvent purification system and stored over 4 Å molecular sieves. Ru­(CO) 4 I 2 was synthesized as described in the literature − and characterized by comparison to literature data. , WN­(NMe 2 ) 3 was synthesized according to established literature methods. − Co­(CO) 3 NO was purchased from Strem Chemicals.…”

Effect of synergic cooperation on optical and photoelectrochemical properties of CeO2–MnO composite thin films

“…The lower cerium content that was found in the deposit is explained by the fact that cerium complex ( 1) is ionic in nature and high in molecular weight, which reduces its content in the aerosol compared with acetatomanganese(II). 47…”