2011
DOI: 10.1134/s0031918x11020268
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Effect of the preparation conditions on the phase composition, structure, and mechanical characteristics of vacuum-Arc Zr-Ti-Si-N coatings

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Cited by 39 publications
(19 citation statements)
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“…The interrelation of mechanical properties of materials, hardness in particular, with the temperature on the surface is discussed in [12,13]. Similar assumptions were made in [14].…”
Section: Resultsmentioning
confidence: 68%
“…The interrelation of mechanical properties of materials, hardness in particular, with the temperature on the surface is discussed in [12,13]. Similar assumptions were made in [14].…”
Section: Resultsmentioning
confidence: 68%
“…2). It is known [6] that the coatings deposited at dierent pressures of nitrogen have dierent level of internal stress: high microhardness is usually accompanied by higher internal stresses that actively relax.…”
Section: Resultsmentioning
confidence: 99%
“…To determine tribological properties of coatings the scratch tester REVETEST (CSM Instruments) [6] was (1312) used. Simultaneously the power of acoustic emission, friction coecient and the penetration depth of the indenter and the value of the normal load (F N ) were recorded.…”
Section: Methodsmentioning
confidence: 99%
“…Особенности формирования структуры нитридных и карбидных плёнок рассмотрены для трёхкомпонентных систем Me-Si-N в ра-ботах Musila [23][24][25][26][27][28], для четырёхкомпонентных Zr-Ti-Si-N и TiHf-Si-N покрытий в работах [29][30][31][32][33]. В работе [29] исследовались структура и механические свойства покрытий Zr-Ti-Si-N, полученных при распылении мишеней ZrTi-Si (Zr -92%, Ti -3,9%, Si -4,1%) и (Zr -64,2%, Ti -32,1%, Si -3,7%) с использованием вакуумно-дугового источника «Булат-6».…”
Section: формирование структуры и свойств многокомпонентных и высокоэunclassified
“…В работе [29] исследовались структура и механические свойства покрытий Zr-Ti-Si-N, полученных при распылении мишеней ZrTi-Si (Zr -92%, Ti -3,9%, Si -4,1%) и (Zr -64,2%, Ti -32,1%, Si -3,7%) с использованием вакуумно-дугового источника «Булат-6». Показано, что при изменении давления газа от 0,3 Па до 0,7 Па и потенциале смещения 100-200 В происходит формиро-вание текстуры роста плоскостью (111) (Zr, Ti)N с различной степе-нью текстурированности (рис.…”
Section: формирование структуры и свойств многокомпонентных и высокоэunclassified