Effective Method for Micro-Patterning Arene-Terminated Monolayers on a Si(111) Electrode

Abstract

Microstructured electrodes are significant to modern electrochemistry. A representative aromatic group, 4-ferrocenylphenyl one, was covalently bound to a micropatterned silicon electrode via the arylation of a hydrogen-terminated silicon(111) surface formed selectively on a Si wafer. Starting from a silicon(100)-on-insulator (SOI) wafer, the aromatic monolayer was attached sequentially by spin-coating a resist, electron beam lithography, Cr/Au deposition, lift-off, anisotropic etching with aqueous KOH solution, and Pd-catalyzed arylation. Cyclic voltammetry (CV) and X-ray photoelectron spectroscopy (XPS) are used to characterize the coupling reaction between 4-ferrocenyl group and silicon substrate, and to confirm performance of the final modified microsized electrode. These data show that this synthetic protocol gives chemically well-defined and robust functionalized monolayers on a silicon semiconducting surface with a small electrode.

Unusual Reactivity of Group 14 Hydrides toward Organic Halides: Synthetic Studies and Application to Functional Materials

“…39 Starting from a Si(100) on insulator wafer, the aromatic monolayer was attached sequentially by spin coating a resist, electron beam lithography, Cr/Au deposition, lift off, anisotropic etching with aqueous KOH solution, 40 and Pd catalyzed arylation (Figure 9(a)). The micro patterned electrode surface was observed by digital microscope and high resolution SEM (Figure 9(b)).…”