Effects of cathode materials and arc current on optimal bias of a cathodic arc through a magnetic duct

Abstract

A negatively biased collecting plate was used to collect the ion current of the cathodic arc plasma transported through a curved magnetic duct. The optimal duct bias at which the duct has the maximum efficiency for plasma transport was measured for C, Ti, Mo, and W plasmas as a function of the arc current and guiding magnetic field. The optimal bias decreased with the magnetic field and was almost steady when the field was above 400 G. The optimal bias at 400 G and above increased with the arc current for C plasma but the opposite relationship was observed for Ti, Mo, and W plasmas. The effects of the plasma density, ion mass, ion kinetic energy, and magnetic field on the optimal bias are discussed.

Bioactivity and cytocompatibility of zirconia (ZrO2) films fabricated by cathodic arc deposition

“…This is thought to be in part due to the effective elimination of Zr macro-particles formed in the cathodic arc by the curved magnetic filter. The process efficacy can be evaluated according to the simulation results of the zirconium contents in the layer [18]. Fig.…”

“…The ZrO 2 thin films were fabricated on n-type, 100 mm Si (1 0 0) wafers using a filtered cathodic arc system [18]. The experimental apparatus used in this study included a magnetic duct and cathodic arc plasma source.…”

Structure and properties of zirconia (ZrO2) films fabricated by plasma-assisted cathodic arc deposition

“…ZrO 2 thin films were deposited on n-type, 100 mm Si (1 0 0) wafers using a filtered cathodic arc system. The experimental apparatus consisted of a magnetic duct and cathodic arc plasma source [21]. A 99.9% pure Zr rod with a diameter of 1 cm served as the cathode and oxygen was bled into the arcing region.…”

Synthesis of aluminum nitride films by plasma immersion ion implantation–deposition using hybrid gas–metal cathodic arc gun

“…They are not affected by the magnetic field and thus strike the wall of the curved duct instead of being transmitted through the curved filter. 22,23 Hence, the deposited films would be free of Al marcoparticles. The schematic of the hardware is depicted in Fig.…”