“…Moreover, the process occurred at room temperature and did not provide sufficient kinetic energy to migrate the grain boundaries blocked by the impurities. Therefore, if there are numerous impurities in the electroplated Cu, the grain size is typically small 31 . This inference is supported by SIMS analysis of chloride, carbon, sulfur, and oxygen in the electroplated Cu foils of PC, PCS0.2, PCS0.5, PCS1.0, and PCS2.0, as shown in Fig.…”