The effect of the deposition temperature of the buffer layer In 2 S 3 on the band alignment of CZTS/In 2 S 3 heterostructures and the solar cell performance have been investigated. The In 2 S 3 films are prepared by thermal evaporation method at temperatures of 30, 100, 150, and 200 • C, respectively. By using x-ray photoelectron spectroscopy (XPS), the valence band offsets (VBO) are determined to be −0.28 ± 0.1, −0.28 ± 0.1, −0.34 ± 0.1, and −0.42 ± 0.1 eV for the CZTS/In 2 S 3 heterostructures deposited at 30, 100, 150, and 200 • C, respectively, and the corresponding conduction band offsets (CBO) are found to be 0.3 ± 0.1, 0.41 ± 0.1, 0.22 ± 0.1, and 0.01 ± 0.1 eV, respectively. The XPS study also reveals that interdiffusion of In and Cu occurs at the interface of the heterostructures, which is especially serious at 200 • C leading to large amount of interface defects or the formation of CuInS 2 phase at the interface. The CZTS solar cell with the buffer layer In 2 S 3 deposited at 150 • C shows the best performance due to the proper CBO value at the heterostructure interface and the improved crystal quality of In 2 S 3 film induced by the appropriate deposition temperature. The device prepared at 100 • C presents the poorest performance owing to too high a value of CBO. It is demonstrated that the deposition temperature is a crucial parameter to control the quality of the solar cells.