2018
DOI: 10.1038/s41598-018-32233-4
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Effects of Unusual Gate Current on the Electrical Properties of Oxide Thin-Film Transistors

Abstract: The wide research and development on oxide thin-film transistors (TFTs) have led to considerable changes in mainstream technology in various electronic applications. Up to now, much research has been focusing on enhancing the performance of oxide TFTs and simplifying fabricating process. At the stage of research and development in the oxide TFT, unexpectedly high gate current phenomena have been continuously reported by several groups, but the origins have not been yet studied in detail. The unusual gate curre… Show more

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Cited by 18 publications
(15 citation statements)
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“…have introduced the outstanding MIOS diode properties such as high rectifying ratio and low leakage current that overcome the disadvantages of conventional p-n junction diodes and Schottky diodes 5 . However, these early-stage MIOS diodes are highly dependent on the semiconductor area used for the cathode 6 . In order to apply MIOS diodes to the TFD in earnest, rigorous mechanism analysis of charge carrier transport through the insulator is required in addition to an accurate understanding of the insulator characteristics during device operation.…”
Section: Introductionmentioning
confidence: 99%
“…have introduced the outstanding MIOS diode properties such as high rectifying ratio and low leakage current that overcome the disadvantages of conventional p-n junction diodes and Schottky diodes 5 . However, these early-stage MIOS diodes are highly dependent on the semiconductor area used for the cathode 6 . In order to apply MIOS diodes to the TFD in earnest, rigorous mechanism analysis of charge carrier transport through the insulator is required in addition to an accurate understanding of the insulator characteristics during device operation.…”
Section: Introductionmentioning
confidence: 99%
“…The results might be caused by the fringe effect originated from unpatterned semiconductor active layers and gate electrodes. In general, the fringe effect can negatively influence the electrical characteristics, showing parasitic capacitance, gate leakage current, and off-current increased [ 44 , 45 ]. As a result, the corresponding amplitude under the dynamic response test might be slightly fluctuated by the undesirable operation of the FTPS devices originated from the fringe effect.…”
Section: Resultsmentioning
confidence: 99%
“…Aluminum (Al) was chosen for the electrodes and deposited through a thermal evaporator using a shadow mask because this metallization process has been widely used for source/drain electrodes and exhibits excellent electrical properties. Finally, the IGZO film was etched by dilute phosphoric acid to define the active areas while the channel area was protected with polyimide tape and reduce excessive gate leakage current [12,22]. For an additional passivation layer on the IGZO film, PMMA (950 PMMA C4, Micro Chemical, USA) was used by spin coating.…”
Section: Methodsmentioning
confidence: 99%