2021
DOI: 10.1364/prj.421612
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Efficient and wideband acousto-optic modulation on thin-film lithium niobate for microwave-to-photonic conversion

Abstract: Microwave photonics, a field that crosscuts microwave/millimeter-wave engineering with optoelectronics, has sparked great interest from research and commercial sectors. This multidisciplinary fusion can achieve ultrawide bandwidth and ultrafast speed that were considered impossible in conventional chip-scale microwave/millimeter-wave systems. Conventional microwave-to-photonic converters, based on resonant acousto-optic modulation, produce highly efficient modulation but sacrifice bandwidth and limit their app… Show more

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Cited by 26 publications
(20 citation statements)
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“…The respective microwave working frequencies are 4.06 GHz and 4.08 GHz. In addition, since large gap width G reduces the metal absorption loss of the optical waveguide and the whole AOM device [1][2][3][4][5], large gaps are preferred in on-chip AOM under the same fabrication processes and requirements. The maximum value locates at the width of w = 2.1 μm for both of the gap width considered.…”
Section: Resultsmentioning
confidence: 99%
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“…The respective microwave working frequencies are 4.06 GHz and 4.08 GHz. In addition, since large gap width G reduces the metal absorption loss of the optical waveguide and the whole AOM device [1][2][3][4][5], large gaps are preferred in on-chip AOM under the same fabrication processes and requirements. The maximum value locates at the width of w = 2.1 μm for both of the gap width considered.…”
Section: Resultsmentioning
confidence: 99%
“…The gap width between the optical waveguide and IDT is G. Moreover, the gap width between the IDT and the left side of the acoustic resonator is chosen as L t (=1.2 µm), to match with the wavelength of the generated SAW. Considering the current fabrication abilities, the slant angle of the TFLN waveguide sidewall is set to 70 • for the proposed AOM design [3,[19][20][21][22][23][24]26]. Note that we also etch two relatively large slots on both sides of the AOM along the y-z direction as shown in Figure 1a (light gray rectangular) to make the corrosive liquid contact with the buried oxide (BOX) layer below the AOM region and remove it via the corrosion method.…”
Section: Methodsmentioning
confidence: 99%
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