2022
DOI: 10.3390/nano12223951
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Efficient Rigorous Coupled-Wave Analysis Simulation of Mueller Matrix Ellipsometry of Three-Dimensional Multilayer Nanostructures

Abstract: Mueller matrix ellipsometry (MME) is a powerful metrology tool for nanomanufacturing. The application of MME necessitates electromagnetic computations for inverse problems of metrology determination in both the conventional optimization process and the recent neutral network approach. In this study, we present an efficient, rigorous coupled-wave analysis (RCWA) simulation of multilayer nanostructures to quantify reflected waves, enabling the fast simulation of the corresponding Mueller matrix. Wave propagation… Show more

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Cited by 2 publications
(5 citation statements)
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“…We develop a method to evaluate the sensitivity using the Mueller matrix (MM) formalism on periodic trenches. All the study is based on simulated spectra based on an optimized RCWA code developed in-house to simulate the 2D gratings scattering spectra [5].…”
Section: Figure 1: Illustration Of Periodic Trenchesmentioning
confidence: 99%
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“…We develop a method to evaluate the sensitivity using the Mueller matrix (MM) formalism on periodic trenches. All the study is based on simulated spectra based on an optimized RCWA code developed in-house to simulate the 2D gratings scattering spectra [5].…”
Section: Figure 1: Illustration Of Periodic Trenchesmentioning
confidence: 99%
“…❖ Mueller matrix Spectroscopic Ellipsometry OCD (SE-OCD) scatterometry configuration gives us Rss and Rpp, but it is possible to extract even more information. Having more points and more coefficients can increase the accuracy and statistical robustness of our study [5][6][7]. A complete description of the polarization state can be obtained through polarimetry with the use of Mueller matrix (MM-OCD configuration) which takes into consideration the cross-polarization effects of the light.…”
Section: Ocd Spectra Generation ❖ Spectroscopic Ellipsometrymentioning
confidence: 99%
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“…First, the operation of the forward model is usually time-consuming in optical scatterometry. Rigorous coupled wave analysis (RCWA) is more effective in calculating periodic structures compared to other methods [19]. However, as the architectures become more complex, the computational efficiency significantly decreases due to the frequent invocation of RCWA with a greater number of slicing layers and higher truncated orders.…”
Section: Nn-based Surrogate Modelmentioning
confidence: 99%