2012 IEEE International SOC Conference 2012
DOI: 10.1109/socc.2012.6398388
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Electrical and fluidic microbumps and interconnects for 3D-IC and silicon interposer

Abstract: High-density electrical microbumps (25 µm diameter and 50 µm pitch) and fluidic microbumps are important to support high-bandwidth signaling, power delivery and microfluidic cooling of highperformance high-power chips in 3DICs and silicon interposer. Simultaneous fabrication of electrical and fluidic microbumps is demonstrated in this paper. Test vehicles are also fabricated for assembly. Four-point resistance measurements and preliminary fluidic testing demonstrate assembly results.

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Cited by 3 publications
(1 citation statement)
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“…To address this need, wafer-level batch fabricated solder microfluidic chip I/Os and fine-pitch electrical microbump I/Os have been recently demonstrated, as shown in Fig. 3 [17]. With this innovative chip I/O technology, this paper proposes and experimentally demonstrates a tierspecific MFHS in a two-tier stack.…”
Section: B Embedded Microfluidic Heat Sink In the Literaturementioning
confidence: 99%
“…To address this need, wafer-level batch fabricated solder microfluidic chip I/Os and fine-pitch electrical microbump I/Os have been recently demonstrated, as shown in Fig. 3 [17]. With this innovative chip I/O technology, this paper proposes and experimentally demonstrates a tierspecific MFHS in a two-tier stack.…”
Section: B Embedded Microfluidic Heat Sink In the Literaturementioning
confidence: 99%