Electrical and optical characterization of SiOxNy and SiO2 dielectric layers and rear surface passivation by using SiO2/SiOxNy stack layers with screen printed local Al-BSF for c-Si solar cells

Balaji, Nagarajan; Nguyen, Huong Thi Thanh; Park, Cheolmin; Ju, Minkyu; Raja, Jayapal; Chatterjee, Somenath; Jeyakumar, R.; Yi, Junsin

doi:10.1016/j.cap.2017.10.004

Cited by 11 publications

(3 citation statements)

References 38 publications

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“…Among them, PECVD and LPCVD are the most commonly employed methods. Additionally, PECVD can be extended to radio frequency PECVD (RF-PECVD) [69], electron cyclotron resonance PECVD (ECR-PECVD) [70,71], and inductively coupled PECVD (IC-PECVD) [72].…”

Section: Preparation Of Sinxoy Filmmentioning

confidence: 99%

A Review: Preparation, Performance, and Applications of Silicon Oxynitride Film

Shi

Guang

et al. 2019

Micromachines

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Silicon oxynitride (SiNxOy) is a highly promising functional material for its luminescence performance and tunable refractive index, which has wide applications in optical devices, non-volatile memory, barrier layer, and scratch-resistant coatings. This review presents recent developments, and discusses the preparation methods, performance, and applications of SiNxOy film. In particular, the preparation of SiNxOy film by chemical vapor deposition, physical vapor deposition, and oxynitridation is elaborated in details.

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Section: Preparation Of Sinxoy Filmmentioning

confidence: 99%

A Review: Preparation, Performance, and Applications of Silicon Oxynitride Film

Shi

Guang

et al. 2019

Micromachines

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“…1 PERC solar cell contains 85-100 nm thin passivation layer of a dielectric material such as SiN x , SiO 2 , SiO x N y , or Al 2 O 3 on the rear side. 2 In order to create electrical contacts with the silicon wafer, narrow openings are created by selectively removing the passivation layer. Various techniques such as photolithography, 3 chemical etching, 4 and laser ablation 5 have been reported in the literature to create narrow openings.…”

Section: Introductionmentioning

confidence: 99%

An experimental study on laser ablation of Ultra-thin SiN_x layer of PERC solar cell

Rana

Khatri

Kottantharayil

et al. 2022

Journal of Micromanufacturing

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In this work, a nanosecond green laser (532 nm) is used to generate narrow openings by removing an ultra-thin (85 nm) SiN x layer that is coated on a silicon substrate for application in the fabrication of Passivated Emitter and Rear Contact (PERC) solar cells. An experimental analysis is presented to identify the optimal range of laser parameters for an efficient ablation with minimal damage to the silicon substrate. The ablated samples were characterized using a 3D profilometer to obtain the surface profiles and scanning electron microscope imaging to observe the surface quality. Further, energy-dispersive X-ray line analysis and atom probe tomography were performed to evaluate the nitrogen content on the surface and along the depth, respectively. The experimental results suggest that the SiN x layer starts to ablate only above a threshold laser fluence of 1.4 J/cm2, while the surface bulged out for laser fluence slightly below the ablation threshold. The central part of the ablated region was clean with a negligible nitrogen concentration at the surface, about ∼0.03% at a fluence of 2.4 J/cm2. Nitrogen concentration reduces continuously and almost becomes zero at 80 nm depth, suggesting complete ablation of the SiN x layer for establishing electrical contacts. The ablation width was close to the laser spot diameter only at lower values of the laser fluence. The lowest value of ablation depth was about 180 nm, suggesting that only about 95 nm layer of the silicon is ablated. The study demonstrates that nanosecond laser ablation is a potential technique for ablation of the SiN x layer of PERC solar cells but requires choosing the optimal parameters.

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“…The sun provides a continuous energy supply more than human beings needed for various purposes so the production of energy using solar cells is a precise aspect of green and clean energy production. [ 1–3 ]…”

Section: Introductionmentioning

confidence: 99%

Review on Efficiency Enhancement Using Natural Extract Mediated Dye‐Sensitized Solar Cell for Sustainable Photovoltaics

Bist

Chatterjee

2021

Energy Tech

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Dye‐sensitized solar cells (DSSCs) have turned a new horizon in energy research due to their widespread exploration over two decades by improving efficiency, cost‐effectiveness, and easy process than inorganic‐based solar cells. The major challenges are metal complexes on designing the cells and sustainability implications for further rapid expansion due to its toxicity. To overcome the problems associated with metal complexes, the dyes are extracted from bionatural sources such as flowers, fruits, barks, petals, roots, leaves, and beans of plants. These organic dyes are being nontoxic, cost‐effective, abundant, environmentally friendly, and easy to extract, which is made them extensively applicable for DSSC. Through this review, readers may get an idea about the effect in the efficiency of the solar cell by applying variable semiconductors, effects of solvents, variable light‐harvesting pigments, types of electrolytes, and modification of counter electrodes by certain polymeric materials or nanomaterials. Furthermore, the effects of methodology, processing temperature, and pH of the medium during synthesis on solar cell parameters, such as the efficiency of DSSC, are critically analyzed which are reported by other researchers.

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Electrical and optical characterization of SiOxNy and SiO2 dielectric layers and rear surface passivation by using SiO2/SiOxNy stack layers with screen printed local Al-BSF for c-Si solar cells

Cited by 11 publications

References 38 publications

A Review: Preparation, Performance, and Applications of Silicon Oxynitride Film

A Review: Preparation, Performance, and Applications of Silicon Oxynitride Film

An experimental study on laser ablation of Ultra-thin SiN_x layer of PERC solar cell

Review on Efficiency Enhancement Using Natural Extract Mediated Dye‐Sensitized Solar Cell for Sustainable Photovoltaics

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Electrical and optical characterization of SiOxNy and SiO2 dielectric layers and rear surface passivation by using SiO2/SiOxNy stack layers with screen printed local Al-BSF for c-Si solar cells

Cited by 11 publications

References 38 publications

A Review: Preparation, Performance, and Applications of Silicon Oxynitride Film

A Review: Preparation, Performance, and Applications of Silicon Oxynitride Film

An experimental study on laser ablation of Ultra-thin SiNx layer of PERC solar cell

Review on Efficiency Enhancement Using Natural Extract Mediated Dye‐Sensitized Solar Cell for Sustainable Photovoltaics

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An experimental study on laser ablation of Ultra-thin SiN_x layer of PERC solar cell