2013
DOI: 10.1186/1556-276x-8-144
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Electrical and optical properties of Al-doped ZnO and ZnAl2O4 films prepared by atomic layer deposition

Abstract: ZnO/Al2O3 multilayers were prepared by alternating atomic layer deposition (ALD) at 150°C using diethylzinc, trimethylaluminum, and water. The growth process, crystallinity, and electrical and optical properties of the multilayers were studied with a variety of the cycle ratios of ZnO and Al2O3 sublayers. Transparent conductive Al-doped ZnO films were prepared with the minimum resistivity of 2.4 × 10−3 Ω·cm at a low Al doping concentration of 2.26%. Photoluminescence spectroscopy in conjunction with X-ray diff… Show more

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Cited by 117 publications
(58 citation statements)
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References 23 publications
(29 reference statements)
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“…mol% concentration. This relationship in our results is consistent with what has been reported by Hou et al [22] in the study of electrical and optical properties of Al doped ZnO and ZnAl 2 O 4 . The average lattice spacing was estimated to be 0.24 nm, which corresponds with (311) lattice spacing of the ZnAl 2 O 4 reported by Zawadzki et al [23].…”
Section: X-ray Diffractionsupporting
confidence: 94%
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“…mol% concentration. This relationship in our results is consistent with what has been reported by Hou et al [22] in the study of electrical and optical properties of Al doped ZnO and ZnAl 2 O 4 . The average lattice spacing was estimated to be 0.24 nm, which corresponds with (311) lattice spacing of the ZnAl 2 O 4 reported by Zawadzki et al [23].…”
Section: X-ray Diffractionsupporting
confidence: 94%
“…This is due to the substitution of Zn 2? (ionic radius 0.74 Å ) [22] with bigger Pb 2? (ionic radius 1.01-1.40 Å ) [24] ions.…”
Section: X-ray Diffractionmentioning
confidence: 99%
“…The measured resistivity of the AZO films was 1.5 × 10 −4 ·cm, which is similar to the experimental values obtained in several reports [33,34]. Higher Al contents in the AZO composition would increase the electrical resistivity due to the transformation of the conductor AZO film into insulator.…”
Section: Optimization Of Ald Growth Rates Of Conductive Be Te and Dsupporting
confidence: 89%
“…The thickness exhibits a lineal behavior with the number of cycles. The growth per cycle (GPC) of the AZO and Al 2 O 3 layers in ALD expo mode are 0.188 ± 0.002 nm/cycle and 0.127 ± 0.001 nm/cycle, respectively, which are comparable values with that reported in the literature for similar deposition conditions to here employed [31,33].…”
Section: Optimization Of Ald Growth Rates Of Conductive Be Te and Dsupporting
confidence: 86%
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