1969
DOI: 10.1116/1.1315671
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Electrical Breakdown in Thin Dielectric Films

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Cited by 82 publications
(18 citation statements)
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“…Although the data rather exhibit a dependency of -0.4 than of -0.5 this small difference cannot be considered as significant, because 2 or 3 data points within the given error bars are not sufficient to decide between both trends. However, in our previous measurements [8] the breakdown strengths of AO-R0 are displayed in the range of 0.07 -1.5 mm fitting a slope of -0.5 which is consistent with [6,7,46] for alumina.…”
Section: Weibull Analysis and Thickness-dependencesupporting
confidence: 85%
“…Although the data rather exhibit a dependency of -0.4 than of -0.5 this small difference cannot be considered as significant, because 2 or 3 data points within the given error bars are not sufficient to decide between both trends. However, in our previous measurements [8] the breakdown strengths of AO-R0 are displayed in the range of 0.07 -1.5 mm fitting a slope of -0.5 which is consistent with [6,7,46] for alumina.…”
Section: Weibull Analysis and Thickness-dependencesupporting
confidence: 85%
“…where E b is the breakdown field, γ is the material-dependent constant, d is the thickness of the dielectric, and ξ is a coefficient that is justified by the mechanism of electric breakdown [34], [36]. In accordance with (1), the breakdown field for solid dielectrics is decreasing according to a power law with increasing thickness.…”
Section: Resultsmentioning
confidence: 90%
“…3 using various functions. There have been extensive studies of electric breakdown in solid dielectrics under ambient conditions [31]- [36]. One of the results of these studies is the thickness-dependent dielectric breakdown law, experimentally proved for a variety of dielectric materials investigated at ambient conditions [31]- [36] …”
Section: Resultsmentioning
confidence: 99%
“…Furthermore, it is very doubtful whether d -1/4 can be used in the range of very small thicknesses as was done by Nicol. [5] and [6] are combined, the total n u m b e r of holes created per second is ji/e 9 (exp(ad) --1) :-j~/e 9 (exp (~od e x p ( --F J F ) ) --1) To make the current j larger than the injected current ji, eFd/Vo must be much larger (7,8) has d r a w n attention to the influence of the positive charges that are left behind by the knocked-off electrons.…”
Section: Discussionmentioning
confidence: 99%
“…When a breakdown occurs, the oxide layer melts in places (Fig. The results are first compared with those obtained by other workers (1)(2)(3)(4) and then with theories on the avalanche breakdown of AI20~ (4)(5)(6)(7)(8). la).…”
mentioning
confidence: 87%