Electrical Degradation and Recovery of Low-Temperature Polycrystalline Silicon Thin-Film Transistors in Polycrystalline Silicon Plasma Process

Chang, Jow‐Ran; Chang‐Liao, Kuei‐Shu; Wang, Tien-Ko; Wu, Yung-Hsien; Lin, Kao-Chao; Chen, Chia-Yu; Chen, Yu-Mou; Tseng, Jen-Pei; Hung, Min-Feng

doi:10.1109/ted.2011.2153855

IEEE Trans. Electron Devices

2011

DOI: 10.1109/ted.2011.2153855

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Electrical Degradation and Recovery of Low-Temperature Polycrystalline Silicon Thin-Film Transistors in Polycrystalline Silicon Plasma Process

Jow‐Ran Chang

Kuei‐Shu Chang‐Liao

Tien-Ko Wang

et al.

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2012

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Electrical Degradation and Recovery of Low-Temperature Polycrystalline Silicon Thin-Film Transistors in Polycrystalline Silicon Plasma Process

Cited by 1 publication

References 22 publications

Electrical Degradation and Recovery of Low-Temperature Polycrystalline-Silicon Thin-Film Transistors With Various Metal Gate Patterns

Electrical Degradation and Recovery of Low-Temperature Polycrystalline-Silicon Thin-Film Transistors With Various Metal Gate Patterns

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