2008
DOI: 10.1149/1.2946430
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Electrical Properties and Fatigue Behaviors of ZrO[sub 2] Resistive Switching Thin Films

Abstract: The resistive switching mechanisms of ZrO 2 memory films are proposed to explain why resistive switching characteristics of Ti/ZrO 2 /Pt device are more stable than those of Pt/ZrO 2 /Pt and Al/ZrO 2 /Pt devices in this study. Different from the Pt/ZrO 2 /Pt and the Al/ZrO 2 /Pt devices, the carrier conduction mechanisms in the Ti/ZrO 2 /Pt device obey space charge limited current theory, which may be caused by the formation of the interface layer between Ti and ZrO 2 . Moreover, the resistive switching mechan… Show more

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Cited by 82 publications
(54 citation statements)
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“…In contrast, the HRS conductive mechanism is dominated by SCLC. Similar combined mechanisms in an RRAM device are reported in other work [33].…”
Section: Discussionsupporting
confidence: 87%
See 3 more Smart Citations
“…In contrast, the HRS conductive mechanism is dominated by SCLC. Similar combined mechanisms in an RRAM device are reported in other work [33].…”
Section: Discussionsupporting
confidence: 87%
“…The typical I-V characteristic of trap-controlled SCLC generally consists of two different regions, as shown in Figure 5, as reported by Lin et al [33]. In the low voltage region, the I-V characteristics exhibit ohmic conduction (I∝V).…”
Section: Space-charge-limited Conductionsupporting
confidence: 58%
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“…SCLC conduction mechanism of HRS is often reported in ReRAM materials with bipolar resistive switching behaviors, such as in Au/Cr/Zr + -implanted-ZrO 2 /n + -Si capacitors [31] and in Ti/ZrO 2 /Pt capacitors [32]. SCLC conduction observed in unipolar SZO capacitors implies that oxygen vacancies formed in perovskite SZO matrix are more mobile.…”
Section: Resultsmentioning
confidence: 97%