Electrical properties and microstructural characterization of Ni/Ta contacts to n-type 6H–SiC

Zhou, Tianyu; Liu, Xuechao; Huang, Wei; Zhuo, Shuangmu; Yanqing, Zheng; Shi, Er-Wei

doi:10.1088/1674-1056/24/12/126801

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2018

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“…These features of Ni electrode will result in degradation in electrical properties, poor adhesion and reliability if the devices are used in a high and wide temperature range. One proposed solution is to consume segregated carbon by introducing additional metal such as Ti, Nb, Ta, etc [9][10][11][12]. Dai et al .…”

Section: Introductionmentioning

confidence: 99%

Electrical Property Study of Ni/Nb Contact to n-Type 4H-SiC

Liu

Zhuo

Chen

et al. 2018

MSF

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A sandwich structure of Ni/Nb/4H-SiC was prepared and annealed at different temperature from 750°C to 1050°C. The electrical property and crystalline structure of Ni/Nb electrode was characterized by transmission line method and X-ray diffraction. It was found that the annealing temperature and the thickness of Ni/Nb layer played an important role in obtaining Ohmic contact. A low specific contact resistance of 1.1×10-5Ω·cm2was obtained when the Ni(50nm)/Nb(50nm) electrode was annealed at 1050°C. The Ohmic contact mechanism of Ni/Nb/4H-SiC was proposed.

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Section: Introductionmentioning

confidence: 99%

Electrical Property Study of Ni/Nb Contact to n-Type 4H-SiC

Liu

Zhuo

Chen

et al. 2018

MSF

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Electrical properties and microstructural characterization of Ni/Ta contacts to n-type 6H–SiC

Abstract: Zhou Tian-Yu(周天宇) a)b) , Liu Xue-Chao(刘学超) a) † , Huang Wei(黄维) a) , Zhuo Shi-Yi(卓世异) a) , Zheng Yan-Qing(郑燕青) a) , and Shi Er-Wei(施尔畏) a) a)

Cited by 1 publication

References 30 publications

Electrical Property Study of Ni/Nb Contact to n-Type 4H-SiC

Electrical Property Study of Ni/Nb Contact to n-Type 4H-SiC

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Electrical properties and microstructural characterization of Ni/Ta contacts to n-type 6H–SiC

Abstract: Zhou Tian-Yu(周天宇) a)b) , Liu Xue-Chao(刘学超) a) † , Huang Wei(黄 维) a) , Zhuo Shi-Yi(卓世异) a) , Zheng Yan-Qing(郑燕青) a) , and Shi Er-Wei(施尔畏) a) a)

Cited by 1 publication

References 30 publications

Electrical Property Study of Ni/Nb Contact to n-Type 4H-SiC

Electrical Property Study of Ni/Nb Contact to n-Type 4H-SiC

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Abstract: Zhou Tian-Yu(周天宇) a)b) , Liu Xue-Chao(刘学超) a) † , Huang Wei(黄维) a) , Zhuo Shi-Yi(卓世异) a) , Zheng Yan-Qing(郑燕青) a) , and Shi Er-Wei(施尔畏) a) a)