Electrical properties of (001)-textured Pb(Zr,Ti)O3 thin films with different BaPbO3 thicknesses

Liang, Chun-Sheng; Wu, Jenn‐Ming

doi:10.1016/j.jcrysgro.2006.02.021

Cited by 3 publications

(2 citation statements)

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“…3a). A BPO (100)-texture was fabricated in [19] by means of an intermediate (001) LaNiO 3 template layer sputtered onto the platinized silicon wafers.…”

Section: Resultsmentioning

confidence: 99%

“…The semi-metal BaPbO 3 (BPO) exhibiting a carrier density of about 2·10 20 cm −3 [11] and room temperature resistivity of 830 [12] and 320 µ ·cm [11] for polycrystalline ceramics with a grain size of 3 to 6 µm and single-crystal samples, respectively, is a low-cost alternative of oxide electrodes. In all the earlier reports on BPO electrode deposition by magnetron sputtering [13][14][15][16][17][18][19], stoichiometric ceramic targets have been used. However, ceramic targets beyond diameters of 100 mm are difficult to fabricate.…”

Section: Introductionmentioning

confidence: 99%

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Polarization Fatigue of NiCr/PZT/BaPbO₃Capacitors on Platinized Silicon Wafers

Suchaneck¹,

Gerlach²

2010

Ferroelectrics

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BaPbO 3 and Pb (Zr 0.40 Ti 0.60 )O 3 thin films were prepared by reactive sputtering on 150 mm platinized silicon substrates. Device structures were fabricated using NiCr top electrodes. The polarization fatigue of these capacitors stacks was investigated for up to 10 9 switching cycles. Polarization decays roughly as the logarithm of the number of polarization reversals. This fatigue behavior was attributed to the NiCr top electrode.

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“…3a). A BPO (100)-texture was fabricated in [19] by means of an intermediate (001) LaNiO 3 template layer sputtered onto the platinized silicon wafers.…”

Section: Resultsmentioning

confidence: 99%