Electrical Properties of Diamond-like Carbon Films Deposited Using a Filtered Cathodic Arc System

Abstract

A new filter arc deposition (FAD) system has been developed to satisfy the requirements of magnetic storage devices. This work briefly describes the 45° magnetic filter cathodic arc deposition process and investigates how substrate bias, hydrogenating, and nitrogen-doping affect the electrical properties of amorphous diamond-like carbon films. Experimental results indicate that increasing in substrate bias and/or nitrogen doping into the film during the process would lower the resistance of the film. All these evidences indicate the post-deposited film is more “graphite-like”. The effect of hydrogen flow in the film is less significant. It is believed that the hydrogen can prevent the nucleation of the graphite phase, and can also stabilize of sp3 bonding. The phenomenon clearly indicates that the film is more “diamond-like”.

Effect of low-energy nitrogen ion treatment of highly ordered pyrolytic graphite on oxygen reduction reaction activity

“…The literature generally splits these into a graphite or G-peak at 1580 cm −1 in crystalline graphite and another band around 1360 cm −1 referred to as the D-peak or disorder peak. 22–24 The experimental findings suggest that the D-peak in the 20-s treated specimen was larger than those of untreated and 180-s treated specimens. It is thought that the D-peak at about 1354 cm −1 is generated by strain of the five- and six-membered rings, which are derived from the substitution of carbon by nitrogen.…”

Dependence on treatment ion energy of nitrogen plasma for oxygen reduction reaction of high ordered pyrolytic graphite

“…The spectra obtained for the treated specimens have two different composite structures, i.e., crystalline graphite or amorphous carbon at around 1580 cm −1 (G-band) and another band at around 1360 cm −1 referred to as the disorder peak (D-band). [33][34][35] Figure 5 shows the I D =I G ratio of specimens on treatment voltage. The I D =I G ratio of specimen increased monotonously with increasing treatment voltage.…”

Structure of Diamond-Like Carbon Film Deposited on Aluminum Oxide Surface with Microstructure

“…The literature generally splits these into a graphite or G-peak at 1580 cm À1 in crystalline graphite, or a band around 1450 -1500 cm À1 in amorphous sp 2 , and an other band around 1360 cm À1 referred to as the D-peak or disordered peak. [14][15][16] Table II summarizes resultant values of the D-peak, G-peak and I G ratio for the obtained DLC films. The G-peak position of the DLC film increased with increasing acceleration voltage.…”

“…Thus, the shift in the G-peak position suggests that the DLC films at larger acceleration voltages had lower concentration of sp 3 bonds. 15,17) FT-IR spectroscopy is used mainly to analyze the relative content of various C-H bonds in the DLC films. 18,19) Figure 6 shows absorption spectra of the C-H bonds in the range of 2700 -3100 cm À1 for the DLC films deposited at different acceleration voltages.…”