Electrical properties of direct deposited piezoelectric thick film formed by gas deposition method annealing effect of the deposited films

Akedo, Jun; Minami, Noriaki; Fukuda, Kouji; Ichiki, Masaaki; Maeda, Ryutaro

doi:10.1080/00150199908014545

Cited by 47 publications

(39 citation statements)

References 5 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The apparatus used for the AD method was constructed as described by Akedo and colleagues [4,[10][11]. Film deposition was conducted through injection of the synthesized powders mixed with helium as a carrier gas onto SUS304 stainless-steel with 50-mm thickness set in the chamber.…”

Section: Methodsmentioning

confidence: 99%

Powder preparation for 0.5 Pb(Ni1/3Nb2/3)O3–0.15 PbZrO3–0.35PbTiO3 thick films by the aerosol deposition method

Kawakami

Yoshikawa

Komagata

et al. 2005

Journal of Crystal Growth

View full text Add to dashboard Cite

Section: Methodsmentioning

confidence: 99%

Powder preparation for 0.5 Pb(Ni1/3Nb2/3)O3–0.15 PbZrO3–0.35PbTiO3 thick films by the aerosol deposition method

Kawakami

Yoshikawa

Komagata

et al. 2005

Journal of Crystal Growth

View full text Add to dashboard Cite

“…Electrical properties of PZT thick layer Figure 8 shows the P±E hysteresis loop of PZT thick layer deposited by this method [10]. For the sample after anealing at 600°C, the remnant polarization reached 20 25 lC/cm 2 and the coercive ®eld was 35 55 kV/ cm.…”

mentioning

confidence: 99%

Study on rapid micro-structuring using Jet molding - Present status and structuring properties toward HARMST

Akedo

2000

Microsystem Technologies

View full text Add to dashboard Cite

Ultra-®ne particles of metal and ceramic materials jetting with the velocities of several hundreds m/s is accumulated on the substrate based on impact adhesion. Recently, the application of this phenomenon for micro electro mechanical systems and micro devise has been investigated. In this paper, the deposition method based on ultra-®ne particle beam and possibilities of its application as HARMST are reported. IntroductionThick ®lm deposition and pattering, the thickness range of 1 to 100 lm, is the subject of a great interest in miniature actuator [1], micro transformer, and thin-®lm inductor [2] applications. Conventional deposition processes such as sputtering, sol-gel method, laser-ablation method and electroplating have some disadvantages such as, low deposition rates and the restrictions on material selection. It is also dif®cult to form such ®lms by conventional bonding and polishing of the bulk materials. For the ®ne pattering, two approaches have been proposed to fabrication of these micro devices. One is the lithographic approach and the other is the sophistication of conventional mechanical fabrication processes. The lithographic approach has the advantageous capability of de®nition of ®ne patterns with little necessity of assembling, however fabrication of more than 10 lm thick structure and introduction of exotic materials such as piezoelectric materials and magnetic materials are extremely dif®cult. The sophisticated conventional mechanical approach has also problems dealing with limitations of machining size and dif®culties of assembling.On the other hand, several deposition methods based on the principle of particle impaction have already been introduced and investigated. They include depositing ultra®ne particles via electrical ®eld acceleration (Electrostatic Particle-Impact Deposition (EPID) [3]), and via acceleration by mixing with high speed gas¯ow (Gas Deposition Method (GDM) [4] or Hypersonic Plasma Particle Deposition (HPPD) [5]). The expected features of these methods are high speed deposition rate and ®lm formation at low temperature. However, no reports have been published on these methodsÕ application to the fabrication of three dimensional micro structures. This is the reason why we study a new molding technology based on impact adhesion of ultra-®ne particles.GDM is the simplest method of energy supplement for the deposition among these methods described above. Recently, we have investigated the deposition mechanism of GDM and modi®ed it for three dimensional microstructuring, Jet molding, and demonstrated some examples of the superiority of Jet-molding for metal and functional ceramic materials [6±8]. In this method ultra ®ne particles of materials are ejected by a jet stream of carrier gas onto the substrate surface through the laser fabricated micro masks.The purpose of this paper is to present and introduce the advantages of this methods, such as;(1) High speed deposition and low process temperature resulting from solid to solid reaction feature of this process (2) Pattering capa...

show abstract

“…In the past decade, aerosol deposition has been employed to generate a ceramic coating [17][18][19]. Ceramic submicron particles were sprayed from a nozzle onto the target surface, and then the particles were collided.…”

Section: Introductionmentioning

confidence: 99%

Thickness and surface structure of a ceramic layer created on three indirect resin composites with aerosol deposition

Taira

Hatono

Tokita

et al. 2010

Journal of Prosthodontic Research

View full text Add to dashboard Cite

Purpose: Aerosol deposition is a technology for coating ceramics with impact consolidation at room temperature. The aim of the present study was to investigate the thickness and the microstructure of the aluminium oxide layer on different three dental resin composite materials created by means of aerosol deposition.Methods: Disk-shaped specimens were fabricated with three resin composites (Estenia C&B, Targis, and Gradia). The specimens were ground flat, and then subjected to aerosol deposition using aluminium oxide submicron particles without inducing a localized temperature rise. The average thickness (AVH) and maximum thickness (Hmax) of the aluminium oxide layer deposited on the resin composite material were measured using a profilometer. Data were analyzed by ANOVA and post-hoc Tukey Compromise test at =0.05. The specimen surfaces were also observed using a scanning electron microscope. Results:The aluminium oxide layer formed on Estenia C&B (AVH 8.1 µm, Hmax 9.1 µm) and Targis (AVH 7.7 µm, Hmax 8.9 µm) were significantly thicker than that on Gradia (AVH 4.2 µm, Hmax 5.4). The micrograph showed that the aluminium oxide layer on Estenia C&Bwas similar to that on Targis. However, the aerosol deposition area of Gradia was seen relatively rough and partly caved. Conclusions:The type of resin composite affected the microstructure of the deposited aluminium oxide layer. The highly filled light-and heat-cured resin 3 composites are advantageous as a target material rather than lower the filled lightcured resin composite.4

show abstract

Electrical properties of direct deposited piezoelectric thick film formed by gas deposition method annealing effect of the deposited films

Cited by 47 publications

References 5 publications

Powder preparation for 0.5 Pb(Ni1/3Nb2/3)O3–0.15 PbZrO3–0.35PbTiO3 thick films by the aerosol deposition method

Powder preparation for 0.5 Pb(Ni1/3Nb2/3)O3–0.15 PbZrO3–0.35PbTiO3 thick films by the aerosol deposition method

Study on rapid micro-structuring using Jet molding - Present status and structuring properties toward HARMST

Thickness and surface structure of a ceramic layer created on three indirect resin composites with aerosol deposition

Contact Info

Product

Resources

About