Electrical study of microfluidic channels isolated with chemically modified porous silicon

Abstract

This paper deals with On-Chip-Electrophoresis separation systems micromachined on porous silicon. The electrical insulation properties of the porous substrates were analyzed and related to physical and chemical treatments such as thermal oxidation and silanisation. From this preliminary study, microfluidic devices including silanized porous silicon layers were realized. Finally, ANSYS 3D-Finite Element Modelling of a microfluidic device was performed using experimental data from the electrical measurements. The geometrical and electrical limitations were then discussed.

Porous silicon for electrical isolation in radio frequency devices: A review

“…But, in this case, the average etch rate is significantly reduced. 32 Furthermore, for high porosity materials, most of the time for microporous silicon, when the electrolyte is released from the pores, we observe high capillary stresses. Indeed, the capillary pressure (DP) is directly related to the average pore size (r) and the surface tension (c LV ) 33 using…”