“…The reported frequency tuning results in the electrostatic scheme to date, however, exhibit complicated behavior including frequency downshifts and upshifts [ 6 , 7 , 8 , 9 , 10 , 11 , 12 , 13 , 14 , 16 ]. Several attempts have been made to develop frequency tuning models that can be used to describe and explain the precise tuning mechanisms of devices [ 6 , 9 , 10 , 19 , 20 , 21 , 22 , 23 , 24 ]. So far, however, these models are not sufficient to comprehensively explain the complicated frequency tuning behavior and the device coupling mechanisms.…”