2006
DOI: 10.1016/j.electacta.2005.07.037
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Electrodeposition of low-stress high magnetic moment Fe-rich FeCoNi thin films

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Cited by 48 publications
(24 citation statements)
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“…Even though chloride baths are known to generate higher stress than sulfate and sulfamate bath in nickel electrodeposits [35], we previously reported that low-stress Fe-rich FeCoNi thin films can be obtained from chloride baths operating at high temperature [27]. In order to enhance the compatibility of bath to other MEMS processes, the pH of FeCoNi electrolytes was increased to four and L'acsorbic acid was added to improve the stability of bath.…”
Section: Methodsmentioning
confidence: 99%
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“…Even though chloride baths are known to generate higher stress than sulfate and sulfamate bath in nickel electrodeposits [35], we previously reported that low-stress Fe-rich FeCoNi thin films can be obtained from chloride baths operating at high temperature [27]. In order to enhance the compatibility of bath to other MEMS processes, the pH of FeCoNi electrolytes was increased to four and L'acsorbic acid was added to improve the stability of bath.…”
Section: Methodsmentioning
confidence: 99%
“…However, little research has been published about the film stress of FeCoNi electrodeposits. Our group showed that stress could be reduced by increasing the deposition temperature during electrodeposition of iron, Fe-rich FeCo binary alloys, Ferich FeCoNi ternary alloys in additive-free acidic chloride bath [27][28][29]. Tabakovic et al investigated the effects of substrate on FeCoNi electrodeposits [30].…”
Section: Introductionmentioning
confidence: 99%
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“…It was shown 24,25 that mentioned above citrates and ammonia inhibit the kinetics of Fe(II) oxidation to Fe(III), but cannot prevent it. Some attempts were made to prolong bath life by adding reducing agents, [26][27][28] but those compounds can affect the bath maintenance and coatings properties.…”
mentioning
confidence: 99%
“…[1,2] Fe films have been intensively investigated; several methods have been used to prepare Fe films. [3][4][5][6][7][8][9][10][11][12][13] Among these techniques, the electrodeposition is becoming more and more attractive because it is a relatively simple and low-cost method for the fabrication of magnetic thin films [14] ; it is one of the most promising technologies in industrial level. [2,15] Electrodeposited magnetic thin films of the iron group metals (Fe, Co, and Ni) are being studied because of potential applications in computer read/write heads.…”
Section: Introductionmentioning
confidence: 99%