“…Furthermore, high concentrations of oxygen atoms within the GaN lattice may generate gallium oxynitride (GaON) compounds, with characteristic crystal structures such as spinel, cubic or sphalerite [16,17]. However, the formation of these ternary compounds is mostly reported in processes where nitrogen is incorporated in the gallium oxide lattice [16][17][18][19], instead of processes where oxygen is incorporated into the gallium nitride lattice [20]. This dissimilarity could be related to the outstanding stability of the GaN wurtzite lattice upon the presence of strong densities of point defects and dislocations, which has been consistently seen in GaN epitaxial films [21,22].…”