“…Electrolytes are readily available for ECV profiling for almost all the important semiconductor materials such as silicon (Si) [5,6], silicongermanium [7], silicon carbide [8], gallium arsenide (GaAs), indium phosphide (InP), GaAs and InPbased materials [9], gallium nitride [10,11], zinc selenide [12,13], etc. To the best of our knowledge, there has been no suitable electrolyte and no detailed report available on the successful ECV profiling of aluminium indium arsenide (AlInAs).…”