Electromagnetically Actuated Mirror Arrays for Use in 3-D Optical Switching Applications

“…To achieve a sufficiently uniform bias magnetic flux density over the desired region, however, large permanent magnets are normally required and must be fixed at a sufficiently small distance from the device region to ensure a proper spatial field distribution, as illustrated in Figure 5. A number of devices have been reported that employ external permanent magnets to obtain bistable or latching state configurations for magnetic MEMS devices [100,101]. This solution, however, makes it impossible to integrate them into a standard IC process flow and requires additional assembly stages to make the component operational.…”

Section: Excitation Sourcesmentioning

confidence: 99%

Integrated Magnetic MEMS Relays: Status of the Technology

2014

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Abstract:The development and application of magnetic technologies employing microfabricated magnetic structures for the production of switching components has generated enormous interest in the scientific and industrial communities over the last decade. Magnetic actuation offers many benefits when compared to other schemes for microelectromechanical systems (MEMS), including the generation of forces that have higher magnitude and longer range. Magnetic actuation can be achieved using different excitation sources, which create challenges related to the integration with other technologies, such as CMOS (Complementary Metal Oxide Semiconductor), and the requirement to reduce power consumption. Novel designs and technologies are therefore sought to enable the use of magnetic switching architectures in integrated MEMS devices, without incurring excessive energy consumption. This article reviews the status of magnetic MEMS technology and presents devices recently developed by various research groups, with key focuses on integrability and effective power management, in addition to the ability to integrate the technology with other microelectronic fabrication processes.

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“…With the advent of MEMS technologies, many different microactuators have been developed with various actuation mechanisms including electromagnetic [14][15][16][17], electrostatic [18,19], electrothermal [20,21], and piezoelectric actuation [22][23][24]. Although electrostatic actuation is one of the most popular actuation methods, it requires high actuation voltage provided by a high voltage amplifier, which must be, in turn, powered by a high voltage power supply, it suffers from the pull-in phenomenon (saddle-node bifurcation), and it does not provide the displacement measurement capability.…”

Section: Motivation and Objectivesmentioning

confidence: 99%

Low Voltage Electrostatic Actuation and Displacement Measurement Through Resonant Drive Circuit

Park

Abdel‐Rahman

2012

Volume 5: 6th International Conference on Micro- And Nanosystems; 17th Design for Manufacturing and the Life Cycle Conference

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Most electrostatic actuators fabricated by MEMS technology require high actuation voltage and suffer from the pull-in phenomenon that limits the operation range. We present an amplitude-modulated resonant drive circuit to drive electrostatic actuators at much lower supply voltage than that of conventional actuators to extend their operation range. Analytical and numerical models facilitate stability analysis of electrostatic actuators coupled with the resonant drive circuit. We study the impact of parasitic capacitance and the quality factor of the resonant drive circuit on the operation range of electrostatic actuators. Furthermore, we present a new method to measure the displacement of electrostatic actuators by sensing the phase delay of the actuation voltage with respect to the input voltage. This measurement method allows us to easily incorporate feedback control into existing electrostatic actuators without any modification to the actuator itself.

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Electromagnetically Actuated Mirror Arrays for Use in 3-D Optical Switching Applications

Cited by 78 publications

References 18 publications

A Design Analysis Of Micromirrors In Stacked Configurations With Moving Electrodes

A Design Analysis Of Micromirrors In Stacked Configurations With Moving Electrodes

Integrated Magnetic MEMS Relays: Status of the Technology

Low Voltage Electrostatic Actuation and Displacement Measurement Through Resonant Drive Circuit

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