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Micromachined needle arrays have been designed, fabricated, and characterized. The design includes arrays of 25 needles with fluid coupling channels and dual structural supports. Numerical modeling of fluid flow characteristics was performed, demonstrating that the needle coupling channels redistribute flow when the input or output ports are fully restricted. Micromachining technologies have been used to batch fabricate hollow metallic fluid coupled needle arrays. The significance of this work includes the development of the hollow metallic micromachined needle arrays for biomedical applications, as well as a discussion of structural, fluidic, and biological design considerations. The micromachined needle array has many advantages, including (a) reduced trauma at penetration site (small size), (b) greater freedom of patient movement (minimal penetration), (c) a practically pain-free drug delivery device (distribution of force), (d) precise control of penetration depth (needle extension length), and (e) they can be stacked and packaged into a 3-D device for fluid transfer.

In this paper, a low-temperature integrated-circuit (IC)-compatible process for fabricating metallic microchannels is described. Arrays of 1-100 metallic microchannels have been fabricated on silicon and glass substrates. The process can be extended to many planar substrate materials including polymers and ceramics. The microchannels are formed using microelectroformed metals. The microchannels demonstrated in this paper use nickel as the structural material and gold as the surface coating on the inside walls of the microchannels. The inner dimensions of the individual microchannels fabricated to date range from 30 m to 1.5 mm in width, 0.5 mm to several centimeters in length, and 5-100 m in thickness. The wall thickness ranges from 5 to 50 m. The microchannel fabrication technology enables the fabrication of surface microchannels with a relatively large cross-sectional area. The metallic microchannels can be fabricated to extend from the substrate edge. Interfacing schemes are given for attaching external pressure feeds. [282]