“…The in-plane version is the most convenient to fabricate with state-of-the-art planar technology, comprising surface micromachining and different techniques of (sil-icon) etching, and creates a good degree of flexibility with respect to different needle designs. Illustrative examples are the sophisticated hollow neural probes of Wise et al, fabricated by anisotropic wet etching of a silicon substrate combined with deep diffused boron etch stops and having CMOS electronic circuitry integrated on the chip [2], [3], the microneedles manufactured by anisotropic wet etching of a silicon substrate, with surface micromachined polysilicon-based fluidic channels on them, by Pisano's group [4], [5], which were later refined by the use of silicon-on-insulator substrates and isotropic etching [6], the hollow micromachined needle arrays by Brazzle et al [7], [8], and the surface micromachined polysilicon microneedles with permeable polysilicon on one side which serves as a microdialysis membrane [9], [10].…”