Electron Beam Test System for GHz-Waveform Measurements on Transmission Lines within MMIC

Fehr, J.-N.; Kubalek, E.

doi:10.1109/euma.1992.335734

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Cited by 9 publications

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“…'Mi technique is suitable for probing within very large scale integrated (VLSI) I C ' s with very small feature sizes in the submicron regime, but suffers up to now on a limited fiequency resolution of 24 GHz[2].…”

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confidence: 99%

Contactless characterization of microwave integrated circuits by device internal indirect electro-optic probing

Taenzler¹,

Novak²,

Kubalek³

Digest of Papers Eleventh Annual 1993 IEEE VLSI Test Symposium

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This paper deals with a contactless working test system for the internal test of monolytic microwave integrated circuits (MMIC) based on both: III-V-semiconductor and Si-suhtrate materiaL This electro-optic test system determines the electrical field above the test-point within the MMIC. Measurements demonstrate the capability of this test system for device internal function control and failure analysis.

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confidence: 99%