Electron temperature control in low-pressure plasmas using a two-mesh-separation technique

Dhayal, Marshal; Forder, D.A.; Short, Robert D.; Bradley, James W.

doi:10.1016/s0042-207x(02)00769-8

Cited by 16 publications

(10 citation statements)

References 12 publications

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“…Wet chemical processing, plasma treatment (glow discharge, corona, and flame), and radiation treatment (ultraviolet irradiation and laser treatment) are the main surface modification techniques employed [26]. In particular, plasma treatment of polymeric materials has become one of the most important methods to enhance wettability, printability, and adhesion without affecting bulk material feature [27,28]. However the hydrophilicity is often lost when the plasma treated surface is exposed to air again.…”

Section: Introductionmentioning

confidence: 99%

Wettability transition of plasma-treated polystyrene micro/nano pillars-aligned patterns

Kong¹,

Yung²,

Xu³

et al. 2010

Express Polym. Lett.

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Abstract. This paper reports the wettability transition of plasma-treated polystyrene (PS) micro/nano pillars-aligned patterns. The micro/nano pillars were prepared using hot embossing on silicon microporous template and alumina nanoporous template, which were fabricated by ultraviolet (UV) lithography and inductive coupled plasma (ICP) etching, and two-step anodic oxidation, respectively. The results indicate that the combination of micro/nano patterning and plasma irradiation can easily regulate wettabilities of PS surfaces, i.e. from hydrophilicity to hydrophobicity, or from hydrophobicity to superhydrophilicity. During the wettability transition from hydrophobicity to hydrophilicity there is only mild hydrophilicity loss. After plasma irradiation, moreover, the wettability of PS micro/nano pillars-aligned patterns is more stable than that of flat PS surfaces. The observed wettability transition and wettability stability of PS micro/nano pillars-aligned patterns are new phenomena, which may have potential in creating programmable functional polymer surfaces.

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Section: Introductionmentioning

confidence: 99%

Wettability transition of plasma-treated polystyrene micro/nano pillars-aligned patterns

Kong¹,

Yung²,

Xu³

et al. 2010

Express Polym. Lett.

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“…Detailed descriptions of operation and working principle of similar processes had been discussed elsewhere for single grid [27] and double grids [28]. Dhayal et al [27] reported that when the grid was biased <5 V, the electron temperature remained approximately constant (<0.5 eV) for the RF power variation from 5 to 40 W. Therefore, the ion energy (E i $ 5T e for argon discharge) remains constant for all the RF power variation used in that study (5-40 W); hence, the ions flux can be varied with changing the RF power at constant ion energy.…”

Section: Methodsmentioning

confidence: 99%

S180 cell growth on low ion energy plasma treated TiO2 thin films

Dhayal

Cho

Moon

et al. 2008

Applied Surface Science

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“…The grids were attached to the ground via a 10 mF capacitor to null RF excitation on the mesh due to RF power in the primary discharge; a detailed description of the operation has been discussed elsewhere. 11,[20][21][22][23][24][25] The acrylic acid monomer was contained in glassware mounted on one flange of the reactor through a microleveler manually controlled gas flow regulator. The acrylic acid monomer was degassed with a freeze-thaw cycle four times before it was admitted to the chamber for the discharge.…”

Section: Methodsmentioning

confidence: 99%

“…Different sizes of circular grids 80 mm in diameter and made of stainless steel were used. The grids were attached to the ground via a 10 μF capacitor to null RF excitation on the mesh due to RF power in the primary discharge; a detailed description of the operation has been discussed elsewhere 11, 20–25…”

Section: Methodsmentioning

confidence: 99%

Use of different size grids to control the surface chemistry of plasma‐polymerized acrylic acid films in a hybrid discharge

Dhayal

2007

J of Applied Polymer Sci

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The surface chemistry of plasma-polymerized acrylic acid (ppAc) films were controlled in a twostage (primary and processing) hybrid radio frequency (RF) discharge by changing the grid wire spacing (d s ). Two regions were defined in terms of d s with respect to Debye length (l d ) in the primary chamber at the grid to control the electron temperature (T e ) and surface chemistry of the ppAc films deposited in the processing chamber. A higher T e (>3 eV) in the processing plasma was possible for d s > l d , whereas decreasing d s relative to l d reduced T e . X-ray photoelectron spectroscopy was used to characterize the ppAc films deposited on a glass substrate. The ppAc films

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Electron temperature control in low-pressure plasmas using a two-mesh-separation technique

Cited by 16 publications

References 12 publications

Wettability transition of plasma-treated polystyrene micro/nano pillars-aligned patterns

Wettability transition of plasma-treated polystyrene micro/nano pillars-aligned patterns

S180 cell growth on low ion energy plasma treated TiO2 thin films

Use of different size grids to control the surface chemistry of plasma‐polymerized acrylic acid films in a hybrid discharge

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