2016
DOI: 10.1109/jphotov.2016.2581421
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Electronic Properties of a-SiO<inline-formula> <tex-math notation="LaTeX">${}_{x}$</tex-math> </inline-formula>N<inline-formula> <tex-math notation="LaTeX">${}_{y}$</tex-math> </inline-formula>:H/SiN<inline-formula> <tex-math notation="LaTeX">${}_{x}$</tex-math> </inline-formula> Stacks for Surface Passivation of P-Type Crystalline Si Wafers

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Cited by 7 publications
(5 citation statements)
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“…Similar preliminary findings in the same system were previously reported by Zhu et al . Work of Cheng et al also found that the chemical passivation component played a more important role after firing the SiON/SiN x stack, and similar stability and passivation effectiveness was shown. Hallam et al showed that the passivation provided by SiON was strongly dependent on it composition, with low NH bond density providing optimal results.…”
Section: Materials and Methods For Silicon Surface Passivationsupporting
confidence: 89%
“…Similar preliminary findings in the same system were previously reported by Zhu et al . Work of Cheng et al also found that the chemical passivation component played a more important role after firing the SiON/SiN x stack, and similar stability and passivation effectiveness was shown. Hallam et al showed that the passivation provided by SiON was strongly dependent on it composition, with low NH bond density providing optimal results.…”
Section: Materials and Methods For Silicon Surface Passivationsupporting
confidence: 89%
“…Gettering can be used to introduce sinks for fast diffusing metallic impurities, such as Fe, Ni, or Cu, into the noncritical parts of the device . A subsequent technique in the solar cell production chain, hydrogen passivation or hydrogenation for short, passivates part of the metallic impurities and dangling bonds of the crystal lattice near structural defects, resulting in an increased minority carrier lifetime …”
Section: Introductionmentioning
confidence: 99%
“…Agglomeration and percolation effects, which could be caused when using a high concentration of nanoparticles in the composite, would induce a worsening of the passivation properties of the composite. In the present work, the largest charge carrier lifetime achieved in this work by using SnO 2 nanoparticles in the composite is smaller than typical values for commonly used passivation layers, such as τ=2.41 ms [23,24] obtained by passivation with the stack a-SiO x N y :H/SiN x . However, that stack is deposited by PECVD whereas the deposition process used in this work is low cost, easy, fast, and there is still room for further enhancement of the lifetime.…”
Section: Si Surface Passivationmentioning
confidence: 52%