Electrostatic membrane deformable mirror wavefront control systems: design and analysis

Bush, Keith; German, Dee; Klemme, B.; Marrs, Anthony; Schoen, Michael

doi:10.1117/12.560521

Cited by 23 publications

(15 citation statements)

References 18 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…In order to describe actuator influence functions, radially symmetric Gauss functions or splines are commonly used [2,37], also. A more detailed static analysis is performed in [38] and [39] for a circularly clamped deformable mirror using a Kirchoff plate model. Additionally, in…”

Section: Mirror Modelingmentioning

confidence: 99%

Modeling and Control of Deformable Membrane Mirrors

Ruppel¹

2012

Adaptive Optics Progress

View full text Add to dashboard Cite

Section: Mirror Modelingmentioning

confidence: 99%

Modeling and Control of Deformable Membrane Mirrors

Ruppel¹

2012

Adaptive Optics Progress

View full text Add to dashboard Cite

“…The first one includes continuous phase sheets, such as conventional piezoelectrical actuators, bimorph and membrane mirrors [10][11][12]. Providing a continuous surface, where also highly reflective coatings can be applied, those devices are advantageous especially for high-energy laser applications.…”

Section: Introductionmentioning

confidence: 99%

MEMS phase former kit for high-resolution wavefront control

et al. 2005

View full text Add to dashboard Cite

The MEMS Phase Former Kit developed by the Fraunhofer IPMS is a complete Spatial Light Modulator system based on a piston-type Micro Mirror Array (MMA) for the use in high-resolution, high-speed optical phase control. It has been designed for an easy system integration into an user-specific environment to offer a platform for first practical investigations to open up new applications in Adaptive Optics. The key component is a fine segmented 240 x 200 array of 40 µm piston-type mirror elements capable of 400 nm analog deflection for a 2pi phase modulation in the visible. Each mirror can be addressed and deflected independently by means of an integrated CMOS backplane address circuitry at an 8bit height resolution. Full user programmability and control is provided by a newly developed comfortable driver software for Windows XP based PCs supporting both a Graphical User Interface (GUI) for stand-alone operation with pre-defined data patterns as well as an open ActiveX programming interface for a closed-loop operation with real-time data from an external source. An IEEE1394a FireWire interface is used for high-speed data communication with an electronic driving board performing the actual MMA programming and control allowing for an overall frame rate of up to 500 Hz. Successful proof-of-concept demonstrations already have been given for eye aberration correction in ophthalmology, for error compensation of leightweight primary mirrors of future space telescopes and for ultra-short laser pulse shaping. Besides a presentation of the basic device concept and system architecture the paper will give an overview of the obtained results from these applications

show abstract

“…2,3 To bring down costs and further reduce weights, recent attention has been directed at using MEMS technology to make deformable thin-film mirrors driven by electrostatic actuators. 4 This work also uses electrostatic actuators, but these are expected to be direct-written on the stationary base and the membrane using a relatively low cost maskless material deposition process. This paper describes manually constructed initial prototypes built in part to provide comparison for the direct-written specimens.…”

Section: Introductionmentioning

confidence: 99%

Adaptive rectangular membranes actuated near boundaries

2006

View full text Add to dashboard Cite

This paper discusses work relevant to small, low-cost, membrane-based lightweight adaptive fast steering mirrors. Small deformable membrane mirrors can in principle provide higher order modes such as defocus, coma, and astigmatism in addition to the frequently available tip and tilt modes. This work uses a small number of electrostatic actuators located very close to two opposite boundaries to avoid possible "print through" problems. A Green's function based formulation is used to obtain the analytical solution. The role of membrane tension on the available modes and stroke is examined in detail, and it is found that greater tension enables low-order correction modes, while small values of tension lead to higher order correction modes. Experimental work on an initial experimental model is also described.

show abstract

Electrostatic membrane deformable mirror wavefront control systems: design and analysis

Cited by 23 publications

References 18 publications

Modeling and Control of Deformable Membrane Mirrors

Modeling and Control of Deformable Membrane Mirrors

MEMS phase former kit for high-resolution wavefront control

Adaptive rectangular membranes actuated near boundaries

Contact Info

Product

Resources

About