MEMS phase former kit for high-resolution wavefront control

Gehner, Andreas; Wildenhain, Michael; Neumann, Hannes; Elgner, Andreas; Schenk, Harald

doi:10.1117/12.618326

Cited by 3 publications

(3 citation statements)

References 22 publications

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“…State-of-the-art segmented SLMs are currently limited to about 32 2 -mirror fast piston-only arrays [1,2], lower pixel count piston-tip-tilt [3], or lower range piston or tilt, 200 · 240 metal mirror arrays [4]. The combination of piston-tip-tilt in each mirror would improve considerably the phase-reconstruction fidelity [5] by allowing a more precise linear piece-wise approximation to smooth functions, while keeping the ability of introducing sharp boundaries if needed.…”

mentioning

confidence: 99%

Flexible fabrication of large pixel count piston-tip-tilt mirror arrays for fast spatial light modulators

Pardo¹,

Cirelli²,

Ferry³

et al. 2007

Microelectronic Engineering

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mentioning

confidence: 99%

Flexible fabrication of large pixel count piston-tip-tilt mirror arrays for fast spatial light modulators

Pardo¹,

Cirelli²,

Ferry³

et al. 2007

Microelectronic Engineering

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“…The voltages required to address the mirrors are provided by DRAM-like storage cells connected to the address electrode(s) of the mirror [ 25 ]. Figure 4 shows an electronic schematic of a pixel with a one-axis tilting mirror.…”

Section: Types and Applicationsmentioning

confidence: 99%

Analog Spatial Light Modulators Based on Micromirror Arrays

et al. 2021

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The Fraunhofer Institute for Photonic Microsystems (IPMS) has been developing and manufacturing micromirror arrays for more than 20 years. While originally focusing on applications related to microlithography and therefore mainly for light in the deep ultraviolet range, the range of applications has been expanded since, including applications in the visible and near-infrared range. This paper gives an overview of the devices and their designs, fabrication, and characterization.

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“…Large scale integrated arrays of tens of thousands up to millions of actuator elements, like in [ 3,4], more often employ parallel-plate actuators or the very similar tilting actuators, where the movement is also essentially parallel to the electrical field, and the range of meta-stability is also limited. These types of micro-actuators suffer from the problem that for force equilibrium stability reasons the gap width between moving part and addressing part of the actuator has to be designed much larger than the desired range of deflection.…”

Section: Introductionmentioning

confidence: 99%

Micro-actuator with extended analog deflection at low drive voltage

et al. 2006

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Electrostatic Micro-actuators are being increasingly used for a wide variety of applications such as spatial light modulators, scanning mirrors, optical cross connects, micro-valves, and others. Usually the electrical forces operate in one direction and are balanced by a mechanical spring. The resulting deflection is then either defined by a mechanical stop, or it is only a meta-stable equilibrium position: at an additional external force or deflection it will snap to a different position, frequently again defined by a mechanical stop. This issue is well known and is often called 'pull-in'. In the often used parallel-plate capacitor actuator, the instability already begins at a deflection of only on third of the original capacitor plate separation. For safety reasons and due to the steep response-curve one can only use an even smaller fraction of the mechanically possible movement. This means, that the gap below the actuator has to be designed very much larger than the required maximum deflection. To get the pre-described force and deflection, a much higher voltage is needed than for potential smaller gap widths. The useable range of deflection for many types of micro-actuators can be extended without the penalty of large drive voltage or low shock resistivity, by employing springs with steeper-than-linear restoring force. Alternatively, the voltage needed for a given range of deflection may be reduced. This paper shows the benefits and how to design and dimension these types of springs.

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MEMS phase former kit for high-resolution wavefront control

Cited by 3 publications

References 22 publications

Flexible fabrication of large pixel count piston-tip-tilt mirror arrays for fast spatial light modulators

Flexible fabrication of large pixel count piston-tip-tilt mirror arrays for fast spatial light modulators

Analog Spatial Light Modulators Based on Micromirror Arrays

Micro-actuator with extended analog deflection at low drive voltage

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