EM radiation from electrostatic nonlinear pull‐in instability of MEMS

Abstract

Electrodynamics theory tells that EM waves are generated from accelerated charged particles. Conventional radiators such as antennas are understood to emit waves because of the current's distribution and accumulation in the capacitor, where electrons are accelerated. In MEMS mechanisms, charges can be accelerated by the mechanical motion, which suggests that an MEMS structure can also be a radiator. The electrodynamics to theoretically analyse the EM wave radiation from MEMS is used. During the electrostatic nonlinear pull-in instability MEMS, where the electrostatic gap has become narrower than the 2/3 of the initial gap, the distributed charges are accelerated at a very high rate so as to generate significant power radiation in the form of EM waves. The MEMS's mechanical accelerations are analysed to calculate the transient radiations in both spatial and frequency domains.

Continuous Resonance Tuning without Blindness by Applying Nonlinear Properties of PIN Diodes

“…In a brief summary, PIN diodes have the advantages of nonlinear properties while the actuated voltages fall in the transition zone, providing the potential capability of continuous tuning in MTM antenna even with a very limited number of units. That is either different from varactors that rely on a large dynamic voltage range, or different from MEMS that have a noncontinuous equivalent capacitance value variation due to the beam membrane pulled in the 1/3 length position [27].…”