Emerging simulation approaches for micromachined devices

Abstract

Abstract-In this survey paper, we describe and contrast three different approaches for extending circuit simulation to include micromachined devices. The most commonly used method, that of using physical insight to develop parameterized macromodels, is presented first. The issues associated with fitting the parameters to simulation data while incorporating design attribute dependencies are considered. The numerical model order reduction approach to macromodeling is presented second, and some of the issues associated with fast solvers and model reduction are summarized. Lastly, we describe the recently developed circuit-based approach for simulating micromachined devices, and describe the design hierarchy and the use of a catalog of parts.

Krylov subspace techniques for reduced-order modeling of large-scale dynamical systems

“…One of the issues associated with this approach is that one must have a representation of g(z) = V T n f (V n z) that can be efficiently stored and evaluated. The challenge of this issue is highlighted in [8]. If f has a certain structure, then one may exploit such structure to derive an efficient representation of g. For example, in [3,2], f is considered as a quadratic function f (x) = Ax + J(x ⊗ x), and in [5], f is represented as a gradient of a scalar function f (x) = ∇ x φ(x).…”

“…Without loss of generality we take this equilibrium at 0, i.e., f (0) = 0. Examples of the origins of nonlinear dynamical systems of the form (1.1) include the simulation of time-varying nonlinear circuit elements by independent excitation source [4,3], and MEMS, such as micro-pressure sensor [8]. The modeling of the dynamical behavior of a voltage-controlled parallelplate electrostatic actuator also derives a set of state equations of the form (1.1) [15, p.138].…”

Review: Automatic Model Reduction for Transient Simulation of MEMS‐based Devices

“…[1]). A circuit is rather accurately described by lumped elements such as discrete resistors, capacitors, inductors, transistors and so on.…”

Perspectives on technology and technology-driven CAD

“…Quite to the contrary, CMOS continues to challenge higher frequency applications in wireless and exciting integrated, single-chip solutions that include RF functionality are becoming common. While silicon is not suitable for optical (light emitting) devices per se, the rapid progress in MEMS-based optical components that can be realized on silicon substrates now spans applications from displays to optical routers [23]. Even farther afield from electronics as we know it, IC micro-fabrication technology, including use of integrated electronics, is rapidly making progress in the biological sciences, predominantly in the areas of genetic research and drug discovery.…”