Emission characteristics of AuSiBe field ion sources

Drandarov, N; Georgieva, Sylvina; Nikolov, Boris P.; Donchev, T.

doi:10.1016/0042-207x(93)90331-4

Cited by 2 publications

(1 citation statement)

References 9 publications

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“…[1][2][3][4][5] To calculate the source performance in a focused ion beam ͑FIB͒ column, the values for the full width at half maximum ͑FWHM͒ of the total energy distribution ͑TED͒ and the corresponding angular intensity ͑IЈ͒ are needed. [1][2][3][4][5] To calculate the source performance in a focused ion beam ͑FIB͒ column, the values for the full width at half maximum ͑FWHM͒ of the total energy distribution ͑TED͒ and the corresponding angular intensity ͑IЈ͒ are needed.…”

Section: Introductionmentioning

confidence: 99%

Emission characteristics of Au60Be40 and Au62Si23Be15 liquid metal ion sources

Schwind¹,

Swanson²

2007

Journal of Vacuum Science &Amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

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Effect of temperature on the emission characteristics of liquid metal alloy ion sources Direct current and pulsed operation of contaminated liquid metal ion sources The angular current densities, relative abundance, and total energy distributions ͑TEDs͒ of the various ion species from the binary Au 60 Be 40 and ternary Au 62 Si 23 Be 15 liquid metal ion sources ͑LMISs͒ have been measured. The results support a postionization mechanism for the formation of the various monoatomic M +2 species, while the M + species are formed by a combination of field evaporation, field ionization, and charge exchange mechanisms. All ion species show an increase in the full width at half maximum of the TEDs with total emission current, mass, and charge. The dominant monoatomic species at 5 A total emission current are Au + ͑64%͒, Au +2 ͑15%͒, Be +2 ͑10%͒, and Be + ͑3.2%͒ for the binary LMIS and Au + ͑63%͒, Au +2 ͑13%͒, Si +2 ͑3.2%͒, Be +2 ͑2.1%͒, and Be + ͑0.71%͒ for the ternary LMIS. The predicted beam sizes for Au +2 and Be +2 for the binary LMIS at a beam current of 5 pA in a typical focusing column are 15 and 8 nm, respectively.

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