Energy- and spatial-resolved detection using a backside-illuminated CMOS sensor in the soft X-ray region

Harada, Tetsuo; Teranishi, Nobukazu; Watanabe, Takeo; Zhou, Quan; Yang, X.; Bogaerts, Jan; Wang, Xinyang

doi:10.7567/1882-0786/ab32d2

Cited by 15 publications

(8 citation statements)

References 26 publications

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“…We also found and corrected the crosstalk phenomenon in the Gsense400BSI series [8] , which came from a design defect of the column structure. Several groups have studied the quantum efficiency of Gsense400BSI sensors with different coatings and the results showed generally good agreement with the theoretical curve [9], [10], [11] . Harada et al [11] presented a new design of the sensor SP3 based on Gsense400BSI, which has a reduced thickness of the entrance window to 5 nm.…”

Section: Introductionsupporting

confidence: 57%

Design and test results of scientific x-ray CMOS cameras

Wang

Ling

Zhang

et al. 2022

X-Ray, Optical, and Infrared Detectors for Astronomy X

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In recent years, scientific CMOS (sCMOS) sensors have found increasing applications to X-ray detection, including Xray astronomical observations. In order to examine the performance of sCMOS sensors, we have developed X-ray cameras based on sCMOS sensors. Two cameras, CNX22 and CNX 66, have been developed using sCMOS sensors with a photosensitive area of 2 cm  2 cm and 6 cm  6 cm, respectively. The designs of the cameras are presented in this paper. The CNX22 camera has a frame rate of 48 fps, whereas CNX66 has a frame rate of currently 20 fps, that can be boosted to 100 fps in the future. The operating temperature of the sCMOS sensor can reach to -20C for CNX22 and -30C for CNX66 with a peltier cooler device. In addition to the commonly used mode of saving original images, the cameras provide a mode of real-time extraction of X-ray events and storage their information, which significantly reduces the requirement for data storage and offline analysis work. For both cameras, the energy resolutions can reach less than 200 eV at 5.9 keV using single-pixel events. These cameras are suitable for X-ray spectroscopy applications in laboratories and calibration for the space X-ray telescopes.

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Section: Introductionsupporting

confidence: 57%

Design and test results of scientific x-ray CMOS cameras

Wang

Ling

Zhang

et al. 2022

X-Ray, Optical, and Infrared Detectors for Astronomy X

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“…In this regard, we recently developed a BSI CMOS soft-X-ray image sensor (SBSA) based on a commercial CMOS sensor without anti reflection (AR) coating. 3) This sensor demonstrated a high QE, low readout noise of 2.6 e − rms, and high frame rate of 48 fps, along with a photon-energy resolution of 80-1000 eV. As regards practical application, we demonstrated fluorescence detection from highly oriented graphite and a polymethyl methacrylate film using a simple setup, wherein the samples faced our CMOS sensor without a monochromator.…”

mentioning

confidence: 99%

“…The sensor's QE was measured at the BL-10 beamline [6][7][8] of the NewSUBARU synchrotron facility (University of Hyogo) same as previous paper. 3) We set the exposure time to 2 ms, for which the signal was not saturated even in the high-gain mode. The sensor temperature was 42 °C as measured by a vacuum-operating embedded temperature sensor.…”

mentioning

confidence: 99%

“…The solid curve denotes the fitting of the simplest dead-layer model omitting the cloud size and transient region. 3) The Si thickness of the SBSA and SP3 sensors were estimated as 3.5 and 9.5 μm, respectively, as per the QE drop above 700 eV and the backside process condition. Importantly, we note that the SP3 sensor exhibits the highest recorded QE for the energy range of 80-1000 eV to the authors' knowledge.…”

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confidence: 99%

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High-exposure-durability, high-quantum-efficiency (>90%) backside-illuminated soft-X-ray CMOS sensor

Harada

Teranishi

Watanabe

et al. 2019

Appl. Phys. Express

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We develop a high-quantum-efficiency, high-exposure-durability backside-illuminated CMOS image sensor for soft-X-ray detection. The backside fabrication process is optimized to reduce the dead-layer thickness, and the Si-layer thickness is increased to 9.5 μm to reduce radiation damage. Our sensor demonstrates a high quantum efficiency of >90% in the photon-energy range of 80–1000 eV. Further, its EUV-regime efficiency is ∼100% because the dead-layer thickness is only 5 nm. The readout noise is as low as 2.5 e− rms and the frame rate as high as 48 fps, which makes the device practical for general soft X-ray experiments.

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“…Two versions of the sCMOS GSENSE400BSI have been evaluated: the GSENSE400BSI-TVISB, the standard visiblelight-dedicated sensor version, and the GSENSE400BSI-GP, an experimental version dedicated to the UV range (Harada et al, 2019), recently developed and not yet commercially available. The backside of the first, as represented on the sensor physical structure in Fig.…”

Section: Soft X-ray Camera Description 21 Scmos Gsense400bsi Characmentioning

confidence: 99%

Backside-illuminated scientific CMOS detector for soft X-ray resonant scattering and ptychography

Desjardins¹,

Medjoubi²,

Sacchi³

et al. 2020

J Synchrotron Rad

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The impressive progress in the performance of synchrotron radiation sources is nowadays driven by the so-called `ultimate storage ring' projects which promise an unprecedented improvement in brightness. Progress on the detector side has not always been at the same pace, especially as far as soft X-ray 2D detectors are concerned. While the most commonly used detectors are still based on microchannel plates or CCD technology, recent developments of CMOS (complementary metal oxide semiconductor)-type detectors will play an ever more important role as 2D detectors in the soft X-ray range. This paper describes the capabilities and performance of a camera equipped with a newly commercialized backside-illuminated scientific CMOS (sCMOS-BSI) sensor, integrated in a vacuum environment, for soft X-ray experiments at synchrotron sources. The 4 Mpixel sensor reaches a frame rate of up to 48 frames s−1 while matching the requirements for X-ray experiments in terms of high-intensity linearity (>98%), good spatial homogeneity (<1%), high charge capacity (up to 80 ke−), and low readout noise (down to 2 e− r.m.s.) and dark current (3 e− per second per pixel). Performance evaluations in the soft X-ray range have been carried out at the METROLOGIE beamline of the SOLEIL synchrotron. The quantum efficiency, spatial resolution (24 line-pairs mm−1), energy resolution (<100 eV) and radiation damage versus the X-ray dose (<600 Gy) have been measured in the energy range from 40 to 2000 eV. In order to illustrate the capabilities of this new sCMOS-BSI sensor, several experiments have been performed at the SEXTANTS and HERMES soft X-ray beamlines of the SOLEIL synchrotron: acquisition of a coherent diffraction pattern from a pinhole at 186 eV, a scattering experiment from a nanostructured Co/Cu multilayer at 767 eV and ptychographic imaging in transmission at 706 eV.

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Energy- and spatial-resolved detection using a backside-illuminated CMOS sensor in the soft X-ray region

Cited by 15 publications

References 26 publications

Design and test results of scientific x-ray CMOS cameras

Design and test results of scientific x-ray CMOS cameras

High-exposure-durability, high-quantum-efficiency (>90%) backside-illuminated soft-X-ray CMOS sensor

Backside-illuminated scientific CMOS detector for soft X-ray resonant scattering and ptychography

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