Energy losses of ions implanted in matter

Abstract

A set of simple and accurate formulae for the first four moments of nuclear and electronic energy losses is proposed. A new variable is introduced to include the finite maximum-impact-parameter effect in the nuclear stopping process, which is assumed to be infinite in most studies. A critical energy at which the electronic energy loss is equal to the nuclear energy loss is also defined. It determines whether the nuclear or the electronic stopping process is the dominant mechanism in terms of incident-ion energy. The critical energy increases for heavy ions implanted in heavy target materials during the first moment of energy loss. The second moment of electronic energy loss is important only for light ions implanted at high ion energies. The third and fourth moments of nuclear energy loss are much larger than those of the electronic energy loss for all ion-target combinations. Theoretical predications of the projected ranges and range stragglings for gold ions implanted in carbon films are close to the experimental data when these proposed four moments of nuclear and electronic energy losses are considered.

Ion induced controlled modifications in structural and optical properties of indium oxide thin films – studies with 25‐keV Co− and N+ beam implantations

“…By carefully choosing and optimizing the ion beam parameters, the materials can be tailored for specific applications. The ion, passing through material, loses its energy either by elastic or in‐elastic collisions, which are energy dependent . At low energy (up to a few keV), the ions undergo elastic collisions (nuclear energy loss) transferring their momentum to neighboring atoms, and point defects are generally produced in the materials.…”

Skewness of implanted ion profiles

“…The expressions of Q k n given in Ref. [22] are employed in this work to obtain the first four moments of nuclear energy loss. That is,…”

“…Reference [22] provides details regarding these four moments. Furthermore, we enhance Bragg's rule [27] to extend the applicability of Eqs.…”