Enhanced properties of In2O3–ZnO thin films deposited on soda lime glass due to barrier layers of SiO2 and TiO2

Hong, Jae-Suk; Rhee, Byoung-Rho; Kim, Hwa-Min; Je, Koo–Chul; Kang, Young-Jin; Ahn, Jeung Sun

doi:10.1016/j.tsf.2004.03.014

Cited by 29 publications

(7 citation statements)

References 16 publications

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“…Transparent conducting oxide (TCO) films have been widely used as transparent electrodes of optoelectronic devices, such as touch screen panels, flat panel displays (FPDs), and thinfilm solar cells. [1][2][3][4][5][6] The FPDs are currently designed for a larger screen with a high quality and a precise image and a more increased pixel density. For high-quality display application, the TCO films must have a high optical transmittance in the visible region, electrical conductivity, surface uniformity, chemical stability, and process compatibility.…”

Section: Introductionmentioning

confidence: 99%

Electronic and Optical Properties of Indium Zinc Oxide Thin Films Prepared by Using Nanopowder Target

Kim

Bae

Sohn

2011

Jpn. J. Appl. Phys.

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Indium zinc oxide (IZO) films were deposited on glass substrates using the rf-magnetron sputtering method and a powder target made up of nanoparticles with a size less than 100 nm. In this study, the optical, structural, and electrical properties of the IZO films deposited using a nanopowder target compared with those of the IZO films deposited using a micropowder target made up of microparticles with a size greater than 30 µm were examined. The IZO films deposited using nanopowder at room temperature were amorphous and showed a low resistivity of 4.5 ×10-4 Ω·cm and a high transmittance over an average of 85% in the visible range, indicating that these films showed more enhanced properties than the IZO film deposited using micropowder. The enhanced properties of the IZO film prepared with nanopowder were considered to be caused by the marked improvement in packing density with increases in refractive index and surface roughness from atomic force microscopy (AFM) images due to the powder target consisting of nanoparticles.

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Section: Introductionmentioning

confidence: 99%

Electronic and Optical Properties of Indium Zinc Oxide Thin Films Prepared by Using Nanopowder Target

Kim

Bae

Sohn

2011

Jpn. J. Appl. Phys.

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“…1,2) Among the various TCO films, indium tin oxide (ITO) films have been extensively utilized owing to their high transmittance in the visible range and low electrical resistivity. Recently, indiumdoped ZnO (IZO) thin films have attracted much attention as an alternative material to ITO films [3][4][5][6][7][8][9][10][11][12][13] because of their superior properties compared with ITO films, such as larger work function, higher transmittance in the 1-1.5 mm range, and higher etching rate. 7) Most of the works on the In-Zn-O ternary system have been confined to materials with high indium content.…”

Section: Introductionmentioning

confidence: 99%

Optical Properties of Indium-Doped ZnO Films

Cao

Liu

Tanemura

et al. 2006

jjap

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Indium-doped ZnO (IZO) films with low In content (<6 at. %) were fabricated by rf helicon magnetron sputtering. The uniformity of the composites was confirmed by elemental analysis. The formation of an In–Zn–O solid solution was verified using X-ray diffraction (XRD) patterns. A wide, high-transmittance region (400–2000 nm) and >80% transmittance in the window of fiber optics telecommunication (1.30–1.55 µm) were observed. The incorporation of indium enhances the optical transmission in the designated visible and infrared wavelengths. The optical band gap shows a slight blue-shift with increasing In doping which can be explained by the Burstein–Moss effect. The Urbach tail parameter E0 increases with increasing indium content, which coincides with the increase in the full width half maximum (FWHM) of (0002) planes in XRD patterns. A decline in crystal quality with In incorporation in IZO films is also confirmed from photoluminescence (PL) spectra.

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“…16) Hong et al reported that the sheet resistance of an InZnO thin film deposited even on a soda-lime glass increases after heat treatment (at 150 °C) caused by the potassium out-diffusion from the glass. 17) In this study, we have investigated the effect of buffer layers such as SiO 2 and Nb 2 O 5 between the ITO layer and the CSG substrate to suppress the out-diffusion of K + from the CSG. As a result, a protected and index-matched 30-nm-thick ITO thin film with sheet resistance less than 120 ³/sq and optical transmittance higher than 90% (at 550 nm) has been achieved.…”

Section: Introductionmentioning

confidence: 99%

Effects of Nb₂O₅and SiO₂buffer layers on the suppression of potassium out-diffusion into indium tin oxide electrode formed on chemically strengthened glass

Hong¹,

Shin²,

Park³

et al. 2014

Jpn. J. Appl. Phys.

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We have investigated the electrical properties of indium tin oxide (ITO) thin films deposited on chemically strengthened glass (CSG) substrate by room-temperature ionized physical vapor deposition (IPVD). The ITO thin film on the CSG substrate shows a higher sheet resistance after hightemperature anneal process (>200 °C) possibly due to the out-diffusion of potassium ions (K + ) from the CSG. We have improved the electrical properties of the ITO thin film by inserting Nb 2 O 5 /SiO 2 buffer layers between the ITO layer and the CSG substrate. As a result, a protected and index-matched 30-nm-thick ITO thin film with sheet resistance less than 120 Ω/sq and optical transmittance higher than 90% (at 550 nm) has been achieved.

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Enhanced properties of In2O3–ZnO thin films deposited on soda lime glass due to barrier layers of SiO2 and TiO2

Cited by 29 publications

References 16 publications

Electronic and Optical Properties of Indium Zinc Oxide Thin Films Prepared by Using Nanopowder Target

Electronic and Optical Properties of Indium Zinc Oxide Thin Films Prepared by Using Nanopowder Target

Optical Properties of Indium-Doped ZnO Films

Effects of Nb₂O₅and SiO₂buffer layers on the suppression of potassium out-diffusion into indium tin oxide electrode formed on chemically strengthened glass

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Enhanced properties of In2O3–ZnO thin films deposited on soda lime glass due to barrier layers of SiO2 and TiO2

Cited by 29 publications

References 16 publications

Electronic and Optical Properties of Indium Zinc Oxide Thin Films Prepared by Using Nanopowder Target

Electronic and Optical Properties of Indium Zinc Oxide Thin Films Prepared by Using Nanopowder Target

Optical Properties of Indium-Doped ZnO Films

Effects of Nb2O5and SiO2buffer layers on the suppression of potassium out-diffusion into indium tin oxide electrode formed on chemically strengthened glass

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Product

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Effects of Nb₂O₅and SiO₂buffer layers on the suppression of potassium out-diffusion into indium tin oxide electrode formed on chemically strengthened glass