Epitaxial Growth of Two-Dimensional Layered Transition Metal Dichalcogenides

Choudhury, Tanushree H.; Zhang, Xiaotian; Balushi, Zakaria Y. Al; Chubarov, Mikhail; Redwing, Joan M.

doi:10.1146/annurev-matsci-090519-113456

Cited by 74 publications

(56 citation statements)

References 110 publications

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“…Also, the precursor sources and some gaseous by‐products (e.g., CO) are toxic, thus precautions need to be implemented to deal with the toxic gases in the MOCVD growth of TMDCs. [ 85 ] The growth of other 2D vdW materials (MXene, BP, and Te, MoO 3 ) has not been reported by MOCVD yet.…”

Section: Wafer‐scale Growth Methodsmentioning

confidence: 99%

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Growth of 2D Materials at the Wafer Scale

Guo

Kim

et al. 2022

Advanced Materials

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der Waals (vdW) layered 2D materials are regarded as a very promising new material system to support postsilicon IC technologies because of their rich and excellent physical properties even with thickness at the atomic scale (<1 nm). [1][2][3] It has been reported that monolayer MoS 2 as a transistor channel can be effectively controlled using 1 nm length carbon nanotube gating. Electric field control on such a short channel can achieve MoS 2 transistors with excellent performance, including an on/off current ratio up to 10 6 and a subthreshold swing (SS) of 65 mV s −1 . [4] This indicates that 2D vdW semiconductors are promising candidates to replace silicon for continued downscaling.Many vdW layered 2D materials have been synthesized and explored since the graphene discovery in 2004. They include highly conductive graphene [1] and MXenes (atomic-thin transition metal carbides and nitrides), [5] transition metal chalcogenides (TMDCs, including both metallic [6] and semiconducting [2] ), 2D elemental semiconductors (black phosphorus (BP), [7] tellurium (Te) [8] ), 2D insulators (e.g., hexagonal boron nitride (h-BN) [9] and some oxides). [10] The large variety of vdW layered 2D materials provides a large potential for advanced 2D electronics.However, for scalable applications, all vdW layered 2D materials face a common challenge: transitioning from micrometer-scale 2D flakes to wafer-scale. [1,2,[11][12][13] This is necessary for scaling up 2D vdW materials application in the high-end semiconductor industry. The history of silicon wafer development and its significant impact on modern information technologies has already demonstrated the importance of a large wafer size for volume production at an acceptable cost. Some materials, such as graphene, [14] h-BN, [15] and TMDCs, [16] have been heavily explored for wafer-scale growth, but the reality is that wafer-scale film quality still has enormous space to improve, especially when compared to chip-grade single-crystalline silicon. Other materials such as MXenes, BP, Te, and vdW oxides, have only a few reported papers focusing on their wafer-scale growth. Hence, we feel that this timely review focusing on wafer-scale growth methods of relevant 2D vdW layered materials is urgently needed.The scope of this review is clarified in Figure 1, where the structures, properties, wafer-scale growth methods, and applications of representative vdW layered 2D materials. We begin by briefly introducing these 2D vdW layered materials and discuss Wafer-scale growth has become a critical bottleneck for scaling up applications of van der Waal (vdW) layered 2D materials in high-end electronics and optoelectronics. Most vdW 2D materials are initially obtained through top-down synthesis methods, such as exfoliation, which can only prepare small flakes on a micrometer scale. Bottom-up growth can enable 2D flake growth over a large area. However, seamless merging of these flakes to form large-area continuous films with well-controlled layer thickness and lattice orientation is still a sign...

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Section: Wafer‐scale Growth Methodsmentioning

confidence: 99%

“…However, some precursors may cause possible carbon residuals contamination in the grown 2D film. [56,85] In contrast to TMDCs, few studies were reported on the growth of graphene and h-BN by the MOCVD process. [86][87][88] Examples of MOCVD processes used to grow TMDCs are illustrated in Figure 11b-f.…”

Section: Mocvd Growth Processmentioning

confidence: 99%

Growth of 2D Materials at the Wafer Scale

Guo

Kim

et al. 2022

Advanced Materials

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“…Typically, MOCVD requires lattice‐matched substrates, such as sapphire and GaN, for growing epitaxially aligned 2D TMDs. [ 51,56 ] It can grow good TMDs on vdW substrates, such as graphene, boron nitride, and TMDs by vdW epitaxy at high temperature (≥ 800 °C). [ 57 ]…”

Section: Thin‐film Techniques For the Compositional Engineering Of 2d Tmdsmentioning

confidence: 99%

Controllable Thin‐Film Approaches for Doping and Alloying Transition Metal Dichalcogenides Monolayers

et al. 2021

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Two‐dimensional (2D) transition metal dichalcogenides (TMDs) exhibit exciting properties and versatile material chemistry that are promising for device miniaturization, energy, quantum information science, and optoelectronics. Their outstanding structural stability permits the introduction of various foreign dopants that can modulate their optical and electronic properties and induce phase transitions, thereby adding new functionalities such as magnetism, ferroelectricity, and quantum states. To accelerate their technological readiness, it is essential to develop controllable synthesis and processing techniques to precisely engineer the compositions and phases of 2D TMDs. While most reviews emphasize properties and applications of doped TMDs, here, recent progress on thin‐film synthesis and processing techniques that show excellent controllability for substitutional doping of 2D TMDs are reported. These techniques are categorized into bottom–up methods that grow doped samples on substrates directly and top–down methods that use energetic sources to implant dopants into existing 2D crystals. The doped and alloyed variants from Group VI TMDs will be at the center of technical discussions, as they are expected to play essential roles in next‐generation optoelectronic applications. Theoretical backgrounds based on first principles calculations will precede the technical discussions to help the reader understand each element's likelihood of substitutional doping and the expected impact on the material properties.

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“…Si maybe is not the best candidate for growth of 2D TMCs, due to the symmetry not matching well. [197,269] The TMCs do not grow readily on Si in general. [270] Will other substrates like GaN, 4H-or 6H-SiC be good candidates for wafer-scale growth?…”

Section: Concluding Remarks and Outlookmentioning

confidence: 99%

Toward Wafer‐Scale Production of 2D Transition Metal Chalcogenides

Wang

Yang

2021

Adv Elect Materials

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When the timeline reached 2004, graphene, the single layer of graphite, was discovered through a scotch-tape exfoliation method and was found to have ultrahigh mobility. [25][26][27] Various 2D materials such as transition metal chalcogenides (TMCs), [28][29][30] boron nitrides (BNs), [31,32] black phosphorus, [33,34] and some new materials including Si, [35] Te, [36] and black arsenic-phosphorus [37] were subsequently synthesized, enabling the fabrication of numerous novel devices. The field of 2D materials is now making strong voice, which is no longer ignored by the scientific and technological community. [38][39][40] Among the various 2D materials, the TMCs constituted by the transition metal elements (M) and the chalcogen elements (X) are a large family. M can range from group 4B to group 10 in the periodic table, while X is S, Se, or Te. [41][42][43][44][45][46][47] Figure 1a exhibits the binary TMCs that have already been explored. This variation of composition of elements transfers to a wide range of properties ranging from insulators (e.g., HfS 2 ), [48,49] semiconductors (e.g., MoS 2 , WS 2 ), [50,51] semimetals (e.g., MoTe 2 , TiSe 2 ), [52,53] to metals (e.g., NbSe 2 , VS 2 ). [54][55][56] Furthermore, TMCs can form alloys in the formula such as WSe 2−x S x , with composition-tunable properties. [57][58][59] Unlike semimetallic graphene, semiconducting TMCs usually possess a bandgap. For example, MoS 2 exhibits a bandgap, transitioning from indirect bandgap to direct bandgap when it thins from bulk phase to monolayer (Figure 1b), boosting the photoluminescence (PL) efficiency. [51,[60][61][62] Additionally, inversion symmetry breaking and large spin-orbit interaction, resulting in two energetic degenerate but inequivalent valleys in the band structure of a TMC (Figure 1c), may lead to breakthroughs in valleytronics and spintronics. [63][64][65][66][67][68][69][70] A few TMCs (e.g., NbSe 2 , TaS 2 , VSe 2 ) have shown superconductivity, [71,72] charge density wave [73,74] and Mott transition (transition from metal to nonmetal). [75,76] In addition, some novel TMCs such as Fe 3 GeTe 2 display intrinsic magnetism with gate-tunable Curie points. [66,77] Semimetallic TMCs like WTe 2 show topological structures in the energy band, enabling the study on topological physics. [78,79] The rich intrinsic properties and superior tunability of TMCs hold great promise for all kinds of technologically important applications in electronics, optoelectronics, spintronics, valleytronics, etc. (Figure 1d). [51,[80][81][82][83][84][85][86][87][88][89][90][91] Due to numerous unique properties of 2D TMCs, devices such as transistors, photodetectors (PDs), and photodiodes based on 2D TMCs have been actively pursued. The ultimate destination of the miniaturization of the electronic devices will 2D transition metal chalcogenides (TMCs) have attracted tremendous interest from both the scientific and technological communities due to their variety of properties and superior tunability through layer number, composition, and inter...

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Epitaxial Growth of Two-Dimensional Layered Transition Metal Dichalcogenides

Cited by 74 publications

References 110 publications

Growth of 2D Materials at the Wafer Scale

Growth of 2D Materials at the Wafer Scale

Controllable Thin‐Film Approaches for Doping and Alloying Transition Metal Dichalcogenides Monolayers

Toward Wafer‐Scale Production of 2D Transition Metal Chalcogenides

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