“…Numerous studies have reported that yttrium oxide films can be used in a wide variety of scientific and engineering applications due to their natural properties. They include high crystallographic stability (up to 2325 1C) [1,2], superior mechanical strength [3], high permittivity ($ [14][15][16][17][18] [4,5], high refractive index ($ 2) [6,7], wide band gap ($ 5.8 eV) [8], low lattice mismatch with silicon (cubic phase) [9] and graphene (hexagonal phase) [10], wellknown host matrix for rare-earth ions [11,12], and a component of several complex materials [13,14].…”