2007
DOI: 10.1016/j.jcrysgro.2007.05.039
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Equilibrium analysis of zirconium carbide CVD growth

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Cited by 31 publications
(16 citation statements)
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“…Many routes were developed to synthesize powders -Selfpropagated High-temperature Synthesis (SHS) reaction, [5][6][7][8] laser pyrolysis, [9][10][11][12][13] fusion synthesis by arc-melting, 14 mechanosynthesis [15][16][17] or thin films by Chemical Vapour Deposition (CVD 18,19 ). Each of these synthesis routes presents both advantages and drawbacks, but they are generally used to produce limited quantities of carbides.…”
Section: Introductionmentioning
confidence: 99%
“…Many routes were developed to synthesize powders -Selfpropagated High-temperature Synthesis (SHS) reaction, [5][6][7][8] laser pyrolysis, [9][10][11][12][13] fusion synthesis by arc-melting, 14 mechanosynthesis [15][16][17] or thin films by Chemical Vapour Deposition (CVD 18,19 ). Each of these synthesis routes presents both advantages and drawbacks, but they are generally used to produce limited quantities of carbides.…”
Section: Introductionmentioning
confidence: 99%
“…The equilibrium calculations suggest that higher pressure is more favorable for single-phase ZrC growth [32]. The experimental trial with a higher operating pressure of 500 Torr (Table 1, entry h) produced films with compositions similar to those obtained with P ¼ 300 Torr (Table 1, entries b, d, and f) at the same H/Zr ratio.…”
Section: Comparison To Equilibrium Predictionsmentioning
confidence: 66%
“…To anticipate the effect of operational parameters on film composition, chemical equilibrium calculations were carried out using the ThermoCalc software to estimate the CVD phase diagram [15,[30][31][32][33]. The calculated phase diagram using ZrNp 4 , benzonitrile as a solvent, and hydrogen carrier is shown in Fig.…”
Section: Thermodynamic Analysismentioning
confidence: 99%
“…ZrC exhibits various outstanding physical and chemical properties, such as ultrahigh hardness (25 GPa) and melting point (3420 1C), high corrosion and wear resistance, lower work function (4.0 eV), and high emissivity and current capacity as well as excellent chemical stability [3,4]. Hence, as one of promising candidates in structural materials, ZrC has been widely applied as refractory materials for cutting tools and wear resistant components [5], crucibles in the mechanical industry [6], and electrical field emitter tips and arrays [7], as well as a nuclear reactor core material due to its low neutron cross-section [8].…”
Section: Introductionmentioning
confidence: 99%