Errors crosstalk analysis and compensation in the simultaneous measuring system for five-degree-of-freedom geometric error

Gao, Shuai; Zhang, Bin; Feng, Qibo; Cui, Cunxing; Chen, Shiqian; Zhao, Yuqiong

doi:10.1364/ao.54.000458

Cited by 13 publications

(5 citation statements)

References 15 publications

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“…For this reason, such methods have also been applied to the geometrical measurement of an object. For instance, measurement of straightness [ 8 , 9 , 10 , 11 ], profile measurement of the surface [ 12 , 13 ], and measurement of multi-axis positions [ 14 , 15 , 16 , 17 , 18 , 19 ].…”

Section: Introductionmentioning

confidence: 99%

An Optical Frequency Domain Angle Measurement Method Based on Second Harmonic Generation

Astuti

Matsukuma

Nakao

et al. 2021

Sensors

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This paper proposes a new optical angle measurement method in the optical frequency domain based on second harmonic generation with a mode-locked femtosecond laser source by making use of the unique characteristic of the high peak power and wide spectral range of the femtosecond laser pulses. To get a wide measurable range of angle measurement, a theoretical calculation for several nonlinear optical crystals is performed. As a result, LiNbO3 crystal is employed in the proposed method. In the experiment, the validity of the use of a parabolic mirror is also demonstrated, where the chromatic aberration of the focusing beam caused the localization of second harmonic generation in our previous research. Moreover, an experimental demonstration is also carried out for the proposed angle measurement method. The measurable range of 10,000 arc-seconds is achieved.

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Section: Introductionmentioning

confidence: 99%

An Optical Frequency Domain Angle Measurement Method Based on Second Harmonic Generation

Astuti

Matsukuma

Nakao

et al. 2021

Sensors

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show abstract

“…Liu [9] developed a 3-beam 6-DOF system based on fiber coupled laser interferometer. Feng and Cui [10][11][12][13] et al developed a series of 2-beam 6-DOF measurement system. Huang [17] developed a 2-beam 5-DOF measurement system based on a monolithic prism to generate a pair of parallel laser beam.…”

Section: Introductionmentioning

confidence: 99%

Embedded Sensor System for Five-degree-of-freedom Error Detection on Machine Tools

Huang¹,

Fan²,

Sun³

2020

Mech. Eng. Sci.

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Any linear stage of machine tool has inherent six-degree-of-freedom (6-DOF) geometric errors. Its motion control system, however, has only the position feedback. Moreover, the feedback point is not the commanded cutting point. This is the main reason why the positioning error along each axis and the volumetric error in the working space are inevitable. This paper presents a compact 5-DOF sensor system that can be embedded in each axis of motion as additional feedback sensors of the machine tool for the detection of three angular errors and two straightness errors. Using the derived volumetric error model, the feedback point can be transferred to the cutting point. The design principle of the developed 5-DOF sensor system is described. An in-depth study of systematic error compensation due to crosstalk of straightness error and angular error is analyzed. A prototype has been built into a three-axis NC milling machine. The results of a series of the comparison experiments demonstrate the feasibility of the developed sensor system.

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“…Therefore, it is a time-consuming work to completely measure all geometric motion errors of the linear precision stage using the laser interferometer [ 7 , 11 , 12 ]. In recent years, some measurement systems for simultaneously measuring multi-DOF geometric motion errors of a long linear stage of a machine tool have been developed in the literature [ 13 , 14 , 15 , 16 , 17 , 18 , 19 , 20 , 21 , 22 , 23 , 24 , 25 , 26 , 27 , 28 , 29 , 30 , 31 ]. For example, for contact measurement, Mura proposed a novel measurement device, consisting of six displacement sensors mounted as a parallel mechanism based on the Stewart theory.…”

Section: Introductionmentioning

confidence: 99%

“…The measurement method is based on a combination of laser interferometry and laser fiber collimation. Positioning error measurement was achieved by laser interferometry, and other five-degree-of-freedom (5DOF) geometric motion errors were obtained by fiber collimation measurement [ 28 , 29 , 30 , 31 ]. However, to the best of the current authors’ knowledge, these techniques are very few.…”

Section: Introductionmentioning

confidence: 99%

Design of a Measurement System for Simultaneously Measuring Six-Degree-Of-Freedom Geometric Errors of a Long Linear Stage

Liu

Chen

et al. 2018

Sensors

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This study designs and characterizes a novel precise measurement system for simultaneously measuring six-degree-of-freedom geometric motion errors of a long linear stage of a machine tool. The proposed measurement system is based on a method combined with the geometrical optics method and laser interferometer method. In contrast to conventional laser interferometers using only the interferometer method, the proposed measurement system can simultaneously measure six-degree-of-freedom geometric motion errors of a long linear stage with lower cost and faster operational time. The proposed measurement system is characterized numerically using commercial software ZEMAX and mathematical modeling established by using a skew-ray tracing method, a homogeneous transformation matrix, and a first-order Taylor series expansion. The proposed measurement system is then verified experimentally using a laboratory-built prototype. The experimental results show that, compared to conventional laser interferometers, the proposed measurement system better achieves the ability to simultaneously measure six-degree-of-freedom geometric errors of a long linear stage (a traveling range of 250 mm).

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Errors crosstalk analysis and compensation in the simultaneous measuring system for five-degree-of-freedom geometric error

Cited by 13 publications

References 15 publications

An Optical Frequency Domain Angle Measurement Method Based on Second Harmonic Generation

An Optical Frequency Domain Angle Measurement Method Based on Second Harmonic Generation

Embedded Sensor System for Five-degree-of-freedom Error Detection on Machine Tools

Design of a Measurement System for Simultaneously Measuring Six-Degree-Of-Freedom Geometric Errors of a Long Linear Stage

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