2018
DOI: 10.1016/j.precisioneng.2018.07.010
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Evaluation of macro sized metal based microgrippers for handling microcomponents

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Cited by 3 publications
(2 citation statements)
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“…Currently the LIGA process is limited to fabrication of 2.5D microstructures, producing only single level pieces. However, the demand for more complex, multilevel metallic parts increases for applications like micro gears, miniature medical components or microelectromechanical systems (MEMS) [1,[8][9][10]. Therefore, there is a need for innovations in the LIGA process to enable multilevel part fabrication.…”
Section: Introductionmentioning
confidence: 99%
“…Currently the LIGA process is limited to fabrication of 2.5D microstructures, producing only single level pieces. However, the demand for more complex, multilevel metallic parts increases for applications like micro gears, miniature medical components or microelectromechanical systems (MEMS) [1,[8][9][10]. Therefore, there is a need for innovations in the LIGA process to enable multilevel part fabrication.…”
Section: Introductionmentioning
confidence: 99%
“…For microgrippers with micrometer dimensions, micromanufacturing processes, commonly used in MEMS, are used. Millimeter-scale grippers can be manufactured using CNC machining, wire electrical discharge machining (WEDM), additive manufacturing, using conventional 3D printers [28], and PolyJet printing processes [29], among others. It is worth mentioning that the processes used for the development of MEMS are costly in terms of prototype manufacturing, being significantly reduced when mass production is carried out.…”
Section: Introductionmentioning
confidence: 99%