Proceedings of the ISES Solar World Congress 2019 2019
DOI: 10.18086/swc.2019.19.13
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Evaluation of the TiO2 Anti-Reflective Coating in PERT Solar Cells with Silicon Dioxide Passivation

Abstract: The PERC solar cell family is manufactured by the industry because the passivation of both faces can improve the efficiency. The passivation and anti-reflective (AR) coating is usually performed using silicon nitride. However, the silicon dioxide may produce a good passivation in the emitter and in the boron BSF. The goal of this paper is to present the analysis of the TiO2 AR coating in PERT solar cells passivated with SiO2. Based on previous studies, the dry oxidation was performed at 800 °C and 860 °C, grow… Show more

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Cited by 5 publications
(5 citation statements)
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“…The flow rates were controlled by pneumatic valves (2), which release the N 2 (carrier gas), and by digital mass flow controllers (3). The silicon wafer is moved under the linear injectors by a conveyor belt (9) heated by a baseplate (10) at 200 °C. The conveyor belt speed was maintained in the range of 60 -70 cm/min.…”
Section: Solar Cell Fabrication Processmentioning
confidence: 99%
See 1 more Smart Citation
“…The flow rates were controlled by pneumatic valves (2), which release the N 2 (carrier gas), and by digital mass flow controllers (3). The silicon wafer is moved under the linear injectors by a conveyor belt (9) heated by a baseplate (10) at 200 °C. The conveyor belt speed was maintained in the range of 60 -70 cm/min.…”
Section: Solar Cell Fabrication Processmentioning
confidence: 99%
“…If the film thickness of SiN X was reduced to 100 nm or increased to 150 nm, the efficiency decreases by 0.05% and 0.09%, respectively 8 . TiO 2 thin films present high refractive index that is optimal for reducing reflection losses of glass-encapsulated solar cells, low extinction factor, high thermal stability and high chemical resistance 9,10 . Atomic layer deposition is the most studied technique for obtaining TiO 2 films because it achieves higher surface passivation.…”
Section: Introductionmentioning
confidence: 99%
“…A espessura do filme AR foi ajustada considerando a diferente espessura da camada de SiO2 em cada face a fim de obter a menor refletância ponderada considerando a resposta espectral da célula solar (Zhao e Green, 1991). Na face com o emissor e campo retrodifusor a espessura do filme AR foi de aproximadamente 50 nm e 25 nm, respectivamente (Zanesco et al, 2019).…”
Section: Metodologiaunclassified
“…The TiO 2 was extensively used by the PV industry until mid-1990's as an ARC. These thin films present high refractive index that is optimal for reducing reflection losses of glass-encapsulated solar cells, low extinction factor, high thermal stability, and high resistance to chemical [10][11][12] . Many deposition techniques have been used to obtain TiO 2 films.…”
Section: Introductionmentioning
confidence: 99%
“…The pulsed laser deposition (PLD) method has been also studied to obtain TiO 2 compound thin films to produce ARC in solar cells or TCOs (transparent conductor oxides) [14][15][16] . The high vacuum evaporation was used to deposit ARC TiO 2 films, but surface passivation was not analyzed 12,13,17,18 .…”
Section: Introductionmentioning
confidence: 99%