Evaluation of two-dimensional strain distribution by STEM/NBD

Uesugi, Fumihiko; Hokazono, A.; Takeno, Shiro

doi:10.1016/j.ultramic.2011.01.035

Cited by 55 publications

(42 citation statements)

References 24 publications

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“…Likewise in metallic specimens, understanding strain and its evolution under deformation will help further the understanding and predictive capabilities of the field. While many techniques of measuring strain exist [2,3,4,5,6,7,8,9], scanning convergent nanobeam electron diffraction (NBED) is attractive for a number of reasons. First, NBED strain mapping offers the potential of very high accuracy in strain measurement.…”

Section: Introductionmentioning

confidence: 99%

Optimizing disk registration algorithms for nanobeam electron diffraction strain mapping

et al. 2017

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Scanning nanobeam electron diffraction strain mapping is a technique by which the positions of diffracted disks sampled at the nanoscale over a crystalline sample can be used to reconstruct a strain map over a large area. However, it is important that the disk positions are measured accurately, as their positions relative to a reference are directly used to calculate strain. In this study, we compare several correlation methods using both simulated and experimental data in order to directly probe susceptibility to measurement error due to non-uniform diffracted disk illumination structure. We found that prefiltering the diffraction patterns with a Sobel filter before performing cross correlation or performing a square-root magnitude weighted phase correlation returned the best results when inner disk structure was present. We have tested these methods both on simulated datasets, and experimental data from unstrained silicon as well as a twin grain boundary in 304 stainless steel.

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Section: Introductionmentioning

confidence: 99%

Optimizing disk registration algorithms for nanobeam electron diffraction strain mapping

et al. 2017

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“…The main advantage is that distances between diffraction spots only depend on the lattice parameter according to Bragg's law [16]. There are different techniques to measure strain using diffraction, e.g., from higher-order Laue zone (HOLZ) lines in convergent-beam electron diffraction (CBED) patterns [17], nano-beam electron diffraction (NBED) [18,19], selected-area diffraction [20] or nano-beam precession electron diffraction [21,22]. In this paper we study the NBED-method proposed by Müller et al [23], which analyzes distances between diffraction reflections.…”

Section: Introductionmentioning

confidence: 99%

Theoretical study of precision and accuracy of strain analysis by nano-beam electron diffraction

et al. 2015

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“…[79] High-resolution applications of diffraction mapping techniques include local Ge concentration determination in Si/SiGe nanostructures, [80] the evaluation of lattice distortions on InP nanowires containing an axial screw dislocation, [81] and strain mapping in metal oxide semiconductor field-effect transistors (MOSFET) devices. [82,83] In addition, improved grain orientation mapping on polycrystalline materials has been demonstrated by the use of precession-enhanced electron diffraction. [84] Moreover, diffraction analysis on STEM mode currently provides new information on electron-scattering processes of crystalline materials.…”

Section: Diffraction Mappingmentioning

confidence: 99%

High‐Resolution Scanning Transmission Electron Microscopy (HRSTEM) Techniques: High‐Resolution Imaging and Spectroscopy Side by Side

et al. 2012

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This work presents an overview of high-resolution scanning transmission electron microscopy (HRSTEM) techniques and exemplifies the novel quantitative characterization possibilities that have emerged from recent advances in these methods. The synergistic combination of atomic resolution imaging and spectroscopy provided by HRSTEM is highlighted as a unique feature that can provide a comprehensive analytical description of material properties at the nanoscale. State-of-the-art high-angle annular dark field and annular bright field examples are depicted as well as the use of X-ray energy-dispersive spectroscopy and electron energy-loss spectroscopy for probing samples properties at the atomic scale. In addition, promising techniques such as cathodoluminescence, confocal HRSTEM, and diffraction mapping are introduced. The presented examples and results indicate that HRSTEM-related techniques are fundamental tools for comprehensive assessment of properties at the atomic scale.

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Evaluation of two-dimensional strain distribution by STEM/NBD

Cited by 55 publications

References 24 publications

Optimizing disk registration algorithms for nanobeam electron diffraction strain mapping

Optimizing disk registration algorithms for nanobeam electron diffraction strain mapping

Theoretical study of precision and accuracy of strain analysis by nano-beam electron diffraction

High‐Resolution Scanning Transmission Electron Microscopy (HRSTEM) Techniques: High‐Resolution Imaging and Spectroscopy Side by Side

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